Abstract:High-sensitivity and simple, low-cost readout are desirable features for sensors independent of the application area. Micro-cantilever sensors use the deflection induced by the analyte presence to achieve high-sensitivity but possess complex electronic readouts. Current holographic sensors probe the analyte presence by measuring changes in their optical properties, have a simpler low-cost readout, but their sensitivity can be further improved. Here, the two working principles were combined to obtain a new hybrid sensor with enhanced sensitivity. The diffractive element, a holographically patterned thin photopolymer layer, was placed on a polymer (polydimethylsiloxane) layer forming a bi-layer macro-cantilever. The different responses of the layers to analyte presence lead to cantilever deflection. The sensitivity and detection limits were evaluated by measuring the variation in cantilever deflection and diffraction efficiency with relative humidity. It was observed that the sensitivity is tunable by controlling the spatial frequency of the photopolymer gratings and the cantilever thickness. The sensor deflection was also visible to the naked eye, making it a simple, user-friendly device. The hybrid sensor diffraction efficiency response to the target analyte had an increased sensitivity (10-fold when compared with the cantilever or holographic modes operating independently), requiring a minimum upturn in the readout complexity.

Humidity Sensor with High Resolution and Fast Response Based on AlN Cantilever with Two Groups of Segmented Electrodes

High Resolution and Fast Response of Humidity Sensor Based on AlN Cantilever With Two Groups of Segmented Electrodes

AN ALN RESONANT MICROCANTILEVER HUMIDITY SENSOR BY ACTIVATING SPECIFIC SETS OF TOP ELECTRODES BASED ON GRAPHENE OXIDE

A novel SAW humidity sensor based on electrosprayed polymerized electrolyte film

Humidity Sensors Based on AlN Microcantilevers Excited at High-Order Resonant Modes and Sensing Layers of Uniform Graphene Oxide

Fabrication and Characterization of Sio2 Microcantilever for High Sensitive Moisture Sensor

Al2O3-coated Microcantilevers for Detection of Moisture at Ppm Level

Micromachined SiO 2 microcantilever for high sensitive moisture sensor

A Novel Serial High Frequency Surface Acoustic Wave Humidity Sensor

AN IMPROVED SENSITIVITY ALN MICROCANTILEVER HUMIDITY SENSOR USING INTERDIGITAL TRANSDUCERS ACTUATED VERY HIGH RESONANT MODE AND GRAPHENE OXIDE SENSING LAYER

A novel surface acoustic wave-impedance humidity sensor based on the composite of polyaniline and poly(vinyl alcohol) with a capability of detecting low humidity

Humidity Sensor Based on Thin-Film Piezoelectric-on-Substrate Resonator and MoS2 for Multifunctional Applications.

Relative Humidity Measurement Technology Based on Microcantilever Resonance

A HUMIDITY SENSOR WITH HIGH SENSITIVITY AND LOW TEMPERATURE COEFFICIENT OF FREQUENCY BASED ON ALN SURFACE ACOUSTIC WAVE AND GRAPHENE OXIDE SENSING LAYER

A Humidity Sensor Based on AlN Lamb Wave Resonator Coated with Graphene Oxide of Different Concentrations

A High Performance Humidity Sensor Based on Surface Acoustic Wave and Graphene Oxide on AlN/Si Layered Structure

Modified Coefficient of Equivalent Mass to Explain Decreased Relative Sensitivity of Piezoelectric Cantilever Humidity Sensor in High Mode

A Novel Humidity Sensor Based On Circular Interdigital Transducers Excited Aln Lamb Wave Device Incorporating Graphene Oxide Layer

A PIEZOELECTRIC RESONANT HUMIDITY SENSOR WITH ENHANCED SENSITIVITY BASED ON HIGH MODE DRIVEN BY INTERDIGITAL TRANSDUCERS COATED WITH UNIFORM GRAPHENE OXIDE FILM

Highly sensitive and fast response Love wave mode humidity sensor based on MoS2@Ti3C2Tx hierarchical structure

Cantilever-Based Sensor Utilizing a Diffractive Optical Element with High Sensitivity to Relative Humidity