Abstract:The utilization of Microelectromechanical Systems (MEMS) technology holds great significance for developing compact and high-performance humidity sensors in human healthcare, and the Internet of Things. However, several drawbacks of the current MEMS humidity sensors limit their applications, including their long response time, low sensitivity, relatively large sensing area, and incompatibility with a complementary metal-oxide-semiconductor (CMOS) process. To address these problems, a suspended aluminum scandium nitride (AlScN) Lamb wave humidity sensor utilizing a graphene oxide (GO) layer is firstly designed and fabricated. The theoretical and experimental results both show that the AlScN Lamb wave humidity sensor exhibits high sensing performance. The mass loading sensitivity of the sensor is one order higher than that of the normal surface acoustic wave (SAW) humidity sensor based on an aluminum nitride (AlN) film; thus the AlScN Lamb wave humidity sensor achieves high sensitivity (∼41.2 ppm per % RH) with only an 80 nm-thick GO film. In particular, the as-prepared suspended AlScN Lamb wave sensors are able to respond to the wide relative humidity (0-80% RH) change in 2 s, and the device size is ultra-compact (260 μm × 72 μm). Moreover, the sensor has an excellent linear response in the 0-80% RH range, great repeatability and long-term stability. Therefore, this work brings opportunities for the development of ultra-compact and high-performance humidity sensors.

A High Performance Humidity Sensor Based on Surface Acoustic Wave and Graphene Oxide on AlN/Si Layered Structure

A HUMIDITY SENSOR WITH HIGH SENSITIVITY AND LOW TEMPERATURE COEFFICIENT OF FREQUENCY BASED ON ALN SURFACE ACOUSTIC WAVE AND GRAPHENE OXIDE SENSING LAYER

A Humidity Sensor Based on AlN Lamb Wave Resonator Coated with Graphene Oxide of Different Concentrations

An Aln Two-Dimensional Acoustic Wave Humidity Sensor With Graphene Oxide As Sensing Layer

Highly Sensitive AIN Surface Acoustic Wave Humidity Sensor Based on Uniform Graphene Oxide Thin Film Formed by Surface Tension

A Novel Serial High Frequency Surface Acoustic Wave Humidity Sensor

A Novel Humidity Sensor Based On Circular Interdigital Transducers Excited Aln Lamb Wave Device Incorporating Graphene Oxide Layer

Surface acoustic wave humidity sensors based on uniform and thickness controllable graphene oxide thin films formed by surface tension

A Humidity Sensor Based on Lamb Wave Resonator with Different Graphene Oxide Film

Fast Response and High Sensitivity ZnO/glass Surface Acoustic Wave Humidity Sensors Using Graphene Oxide Sensing Layer

Humidity Sensors Based on AlN Microcantilevers Excited at High-Order Resonant Modes and Sensing Layers of Uniform Graphene Oxide

Specific Sensing Mechanism Investigation of Surface Acoustic Wave Humidity Sensors Coated with Uniform Graphene Oxide Membrane

Flexible Surface Acoustic Wave Humidity Sensor with on Chip Temperature Compensation

A Miniaturized Integrated SAW Sensing System for Relative Humidity Based on Graphene Oxide Film

Ultra-compact and high-performance suspended aluminum scandium nitride Lamb wave humidity sensor with a graphene oxide layer

High performance graphene oxide-based humidity sensor integrated on a photonic crystal cavity

Graphene oxide decorated multi-frequency surface acoustic wave humidity sensor for hygienic applications

AN ALN RESONANT MICROCANTILEVER HUMIDITY SENSOR BY ACTIVATING SPECIFIC SETS OF TOP ELECTRODES BASED ON GRAPHENE OXIDE

AN IMPROVED SENSITIVITY ALN MICROCANTILEVER HUMIDITY SENSOR USING INTERDIGITAL TRANSDUCERS ACTUATED VERY HIGH RESONANT MODE AND GRAPHENE OXIDE SENSING LAYER

Graphene/LiNbO3 Surface Acoustic Wave Device Based Relative Humidity Sensor

Highly Sensitive Humidity Sensor Based on a GO/Co-MOF-74 Coated Long Period Fiber Grating