Abstract:The utilization of Microelectromechanical Systems (MEMS) technology holds great significance for developing compact and high-performance humidity sensors in human healthcare, and the Internet of Things. However, several drawbacks of the current MEMS humidity sensors limit their applications, including their long response time, low sensitivity, relatively large sensing area, and incompatibility with a complementary metal-oxide-semiconductor (CMOS) process. To address these problems, a suspended aluminum scandium nitride (AlScN) Lamb wave humidity sensor utilizing a graphene oxide (GO) layer is firstly designed and fabricated. The theoretical and experimental results both show that the AlScN Lamb wave humidity sensor exhibits high sensing performance. The mass loading sensitivity of the sensor is one order higher than that of the normal surface acoustic wave (SAW) humidity sensor based on an aluminum nitride (AlN) film; thus the AlScN Lamb wave humidity sensor achieves high sensitivity (∼41.2 ppm per % RH) with only an 80 nm-thick GO film. In particular, the as-prepared suspended AlScN Lamb wave sensors are able to respond to the wide relative humidity (0-80% RH) change in 2 s, and the device size is ultra-compact (260 μm × 72 μm). Moreover, the sensor has an excellent linear response in the 0-80% RH range, great repeatability and long-term stability. Therefore, this work brings opportunities for the development of ultra-compact and high-performance humidity sensors.

AN IMPROVED SENSITIVITY ALN MICROCANTILEVER HUMIDITY SENSOR USING INTERDIGITAL TRANSDUCERS ACTUATED VERY HIGH RESONANT MODE AND GRAPHENE OXIDE SENSING LAYER

AN ALN RESONANT MICROCANTILEVER HUMIDITY SENSOR BY ACTIVATING SPECIFIC SETS OF TOP ELECTRODES BASED ON GRAPHENE OXIDE

Humidity Sensors Based on AlN Microcantilevers Excited at High-Order Resonant Modes and Sensing Layers of Uniform Graphene Oxide

A Novel Humidity Sensor Based On Circular Interdigital Transducers Excited Aln Lamb Wave Device Incorporating Graphene Oxide Layer

A Humidity Sensor Based on AlN Lamb Wave Resonator Coated with Graphene Oxide of Different Concentrations

A HUMIDITY SENSOR WITH HIGH SENSITIVITY AND LOW TEMPERATURE COEFFICIENT OF FREQUENCY BASED ON ALN SURFACE ACOUSTIC WAVE AND GRAPHENE OXIDE SENSING LAYER

An Aln Two-Dimensional Acoustic Wave Humidity Sensor With Graphene Oxide As Sensing Layer

A PIEZOELECTRIC RESONANT HUMIDITY SENSOR WITH ENHANCED SENSITIVITY BASED ON HIGH MODE DRIVEN BY INTERDIGITAL TRANSDUCERS COATED WITH UNIFORM GRAPHENE OXIDE FILM

Al2O3-coated Microcantilevers for Detection of Moisture at Ppm Level

A High Performance Humidity Sensor Based on Surface Acoustic Wave and Graphene Oxide on AlN/Si Layered Structure

Fabrication and Characterization of Sio2 Microcantilever for High Sensitive Moisture Sensor

Humidity Sensor with High Resolution and Fast Response Based on AlN Cantilever with Two Groups of Segmented Electrodes

High Resolution and Fast Response of Humidity Sensor Based on AlN Cantilever With Two Groups of Segmented Electrodes

An Ultrasensitive QCM Humidity Sensor Based on GO/OH-GQDs

Development of a Highly Sensitive Humidity Sensor Based on a Piezoelectric Micromachined Ultrasonic Transducer Array Functionalized with Graphene Oxide Thin Film

A Humidity Sensor Based on Lamb Wave Resonator with Different Graphene Oxide Film

High performance graphene oxide-based humidity sensor integrated on a photonic crystal cavity

Highly Sensitive AIN Surface Acoustic Wave Humidity Sensor Based on Uniform Graphene Oxide Thin Film Formed by Surface Tension

A Human Respiratory Monitoring Sensor Based on an AlN Resonant Microcantilever Coated with Graphene Oxide

Ultra-compact and high-performance suspended aluminum scandium nitride Lamb wave humidity sensor with a graphene oxide layer

Graphene oxide/cellulose nanofiber-based capacitive humidity sensor with high sensitivity