Abstract:Laterally excited bulk acoustic resonators (XBARs) are plate mode resonators in which one of the higher-order plate modes transforms into the bulk acoustic wave (BAW) due to the very thin plates used in these devices. The propagation of the primary mode is usually accompanied by numerous spurious modes, which deteriorate resonator performances and restrict potential XBARs' applications. This article suggests a combination of different methods for insight into the nature of the spurious modes and their suppression. Analysis of the BAW slowness surface provides optimization of XBARs for single-mode performance in the filter passband and around it. The rigorous simulation of admittance functions in the optimal structures allows for further optimization of electrode thickness and duty factor. Finally, the nature of different plate modes generated in a wide frequency range is clarified via simulation of dispersion curves, which characterize acoustic mode propagation in a thin plate under the periodic metal grating, and visualization of displacements accompanying wave propagation. Application of this analysis to lithium niobate (LN)-based XBARs demonstrated that in LN cuts with Euler angles (0°, 4°-15°, 90°) and plate thickness dependent on orientation and varying between 0.05 and 0.1 wavelengths, the spurious-free response could be achieved. Due to tangential velocities of 18-37 km/s combined with the coupling of 15%-17% and feasible duty factor a/p = 0.5, the found XBAR structures can be applied in high-performance 3-6 GHz filters.

Application of Free Side Edges to Thickness Shear Bulk Acoustic Resonator on Lithium Niobate for Suppression of Transverse Resonances

Transverse Mode Suppression of Thickness Shear Bulk Acoustic Resonators on Lithium Niobate Using Standard and Broadband Piston Mode Designs

Double Busbar Structure for Transverse Energy Leakage and Resonance Suppression in Surface Acoustic Wave Resonators Using 42°YX-Lithium Tantalate Thin Plate

Full 3D FEM Simulation of Thickness Shear Bulk Acoustic Resonators on LN Assisted by Hierarchical Cascading Technique

Transverse energy confinement and resonance suppression in SAW resonators using low-cut lithium tantalate

Use of periodic trenches in SMR-type XBAR for suppression of transverse mode resonances and lateral leakage

Field analyses of thickness shear bulk acoustic resonators with different electrode edge ratio using full three dimensional finite element method simulation

Lateral Size-Dependence in UHF Mode-Coupled ZnO FBARs to Suppress Undesirable Eigen-Modes and Weaken Mounting Effect

Spurious Mitigation of Layered Surface Acoustic Wave Resonators With Double-Busbar Configuration Using 42YX-Lithium Tantalate Thin Plate

Spurious Modes in Laterally Excited Bulk Acoustic Resonators (XBARs): Analysis and Suppression

Solidly Mounted Longitudinally Excited Shear Wave Resonator (YBAR) Based on Lithium Niobate Thin-Film

Combination of Tetragonal Crystals With LiTaO3 Thin Plate for Transverse Resonance Suppression of Surface Acoustic Wave Devices

Suppression of spurious responses near anti-resonance of TC-SAW resonators by selective thinning of SiO2

Study on the Spurious Modes in FBAR Resonators with Quasi-Free Edges

Manipulation of SAW Slowness Shape Using Low-Cut LT/Quartz Structure for Transverse Resonance Suppression Without K2 Deterioration

Suppression of spurious modes in lateral-excited bulk acoustic wave resonators using piston mode electrodes

Design and Analysis of Lithium-Niobate-Based Laterally Excited Bulk Acoustic Wave Resonator with Pentagon Spiral Electrodes.

Suppression of Spurious Lateral Modes and Undesired Coupling Modes in Frame-Like FBARs by 2-D Theory

Spurious-Free Shear-horizontal SAW Resonators Using LiTaO3/SiO2/Si Substrate

Tilted Interdigital-transducer in NS-SAW Resonator for Transverse Mode Suppression

Transverse Modes in Temperature Compensated Surface Acoustic Wave Devices