Methods for InSb nanowire manufacturing and Mn doping both based on multi-step glancing-angle deposition process

Zhang Qiuyun,Hong Yanxue,Li Kan,Xing Yingjie,Xu Hongqi
2016-01-01
Abstract:The invention relates to methods for InSb nanowire manufacturing and Mn doping both based on a multi-step glancing-angle deposition process. The method for InSb nanowire manufacturing includes the steps of (1), manufacturing monocrystal pure-In nanowires by the multi-step glancing-angle deposition technology; (2), depositing Sb coating on the surface of the pure In nanowires to form an In-Sb core-shell structure; (3), subjecting the In-Sb core-shell structure to annealing treatment to realize crystallization reaction when the In-Sb core-shell structure is in solid phase so as to form the InSb nanowires. The method for Mn doping includes the steps of (1), manufacturing the monocrystal pure-In nanowires by the multi-step glancing-angle deposition technology; (2), depositing Mn coating on the surface of the pure In nanowires to form an In-Mn core-shell structure; (3), depositing Sb coating on the surface of the Mn coating and then performing annealing treatment so as to form the Mn doped InSb nanowires. By the methods, manufacturing of InSb nanowires and Mn doping at a low temperature are achieved, and the InSb nanowires with high content of Mn are obtained.
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