Design of a MEMS gyroscope array with high sensitivity

Yanling Hao,Bo Liu,Guangtao Zhou
DOI: https://doi.org/10.13245/j.hust.140310
2014-01-01
Abstract:The design of a four degree-of-freedom (DOF) MEMS vibratory gyroscope was reported . Multiple sense-mode oscillators were utilized in the MEMS gyroscope array design ,which were based on the Coriolis-induced motion .Compared with the conventional gyroscopes ,the gain was improved and the robustness was retained at the same time .In the 4-DOF vibratory gyroscope design ,two com-plete 2-DOF sense-mode oscillators with constant spaced resonance frequencies were utilized in sense-mode .The sensitivity and the robustness were considered through setting the spacing between reso-nance frequencies .The array combines two sense-mode oscillators output to increase the response gain and the sensitivity of the gyroscope .The simulation results show that compared with gyroscope with a single sense-mode oscillator ,the gain of gyroscope array is increased by about 8 dB ;a 3 dB bandwidth of 220 and 160 Hz are provided in sense-mode and drive-mode respectively ;two modes are highly matched with each other ,forming a 160 Hz bandwidth for the entire system .The array is robust to the structural parameter variations and the fabrication error ,illustrating that it could satisfy the re-quirements in practical applications .
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