Abstract:This work analyses circuit phase delay for carrier-modulation MEMS capacitive gyroscopes. The temperature-dependent circuit phase delay is a major source of gyroscope output drift, which deteriorates the gyroscope bias instability (BI) and angle random walk (ARW). Effects of both drive-mode and sense-mode circuit phase delay on gyroscope performance when using different signal extraction architectures are analyzed in detail. The online suppression method which combines the so-called modified double sideband (MDSB) extraction architecture in the gyroscope drive mode and closed-loop force-rebalance loop in the sense mode can eliminate the impact of residual fluctuation error of circuit phase delay in real time. When drive-mode circuit phase delay equivalently varies from -20 degrees to 20 degrees, using MDSB decreases the fluctuation of the open-loop zero-rate output (ZRO) by 70% compared to using double sideband (DSB) and by 99.7% with respect to using single sideband (SSB). Meanwhile, improvement for the closed-loop ZRO using MDSB is 92.48% and 94% compared to cases using DSB and SSB, respectively. Furthermore, when the equivalent circuit phase delay of the sense-mode alters from -20 degrees to 20 degrees, ZRO variation for the gyroscope with force rebalanced sense loop and quadrature stiffness nulling loop decreases by 80% in contrast to the case with open loop, which demonstrates the effectiveness of online suppression for circuit phase delay of both the drive-mode and sense-mode. Using the online suppression method, the gyroscope has achieved a BI of 0.16 degrees h(-1) and ARW of 0.011 degrees (root h)(-1). Furthermore, using the MDSB in the drive mode obtains the best stability compared to using the DSB and SSB as the temperature changes.

Mode-matching control system design of silicon MEMS gyroscope

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MEMS gyroscopes parametric excitation control scheme with constant resonant frequency

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Effects Of Both The Drive- And Sense-Mode Circuit Phase Delay On Mems Gyroscope Performance And Real-Time Suppression Of The Residual Fluctuation Phase Error

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A MEMS Vibratory Gyroscope With Real-Time Mode-Matching and Robust Control for the Sense Mode

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IN-SITU MODE-MATCHING CONTROL FOR A SINGLE-CHIP HORIZONTAL DUAL-AXIS MEMS GYROSCOPE BASED ON MODULATING QUADRATURE COUPLING WITH SILICON GRATINGS

Research on Mode-Matching Control Circuit for Micromechanical Silicon Gyroscope Based on Excitation-Calibration Alibration Technology

In-Run Mode-Matching of MEMS Gyroscopes Based on Power Symmetry of Readout Signal in Sense Mode

MEMS Gyroscope Automatic Real-Time Mode-Matching Method Based on Phase-Shifted 45° Additional Force Demodulation

Structure model and system simulation of MEMS gyroscope