Abstract:This paper reports a novel oscillation control algorithm for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation (MEAM) technique, which enhances the robustness against the frequency variation of the driving mode, compared to the conventional EAM (CEAM) scheme. In this approach, the carrier voltage exerted on the proof mass is frequency-modulated by the drive resonant frequency. Accordingly, the pick-up signal from the interface circuit involves a constant-frequency component that contains the amplitude and phase information of the vibration displacement. In other words, this informational detection signal is independent of the mechanical resonant frequency, which varies due to different batches, imprecise micro-fabrication and changing environmental temperature. In this paper, the automatic gain control loop together with the phase-locked loop are simultaneously analyzed using the averaging method and Routh–Hurwitz criterion, deriving the stability condition and the parameter optimization rules of the transient response. Then, a simulation model based on the real system is set up to evaluate the control algorithm. Further, the proposed MEAM method is tested using a field-programmable-gate-array based digital platform on a capacitive vibratory gyroscope. By optimizing the control parameters, the transient response of the drive amplitude reveals a settling time of 45.2 ms without overshoot, according well with the theoretical prediction and simulation results. The first measurement results show that the amplitude variance of the drive displacement is 12 ppm in an hour while the phase standard deviation is as low as 0.0004°. The mode-split gyroscope operating under atmospheric pressure demonstrates an outstanding performance. By virtue of the proposed MEAM method, the bias instability and angle random walk are measured to be 0.9° h−1 (improved by 2.4 times compared to the CEAM method) and 0.068° (√h)−1 (improved by 1.4 times), respectively.

Research on Mode-Matching Control Circuit for Micromechanical Silicon Gyroscope Based on Excitation-Calibration Alibration Technology

A MICROMECHANICAL MODE-MATCHED GYROSCOPE USING STIFFNESS NONLINEARITY AND ELECTROSTATIC TUNING

Identification and Suppression of Driving Force Misalignment Angle for a MEMS Gyroscope Using Parametric Excitation

MEMS gyroscopes parametric excitation control scheme with constant resonant frequency

Design and Test of MEMS Gyroscope Control System Based on LMSD

A 0.09°/h Bias-Instability MEMS Gyroscope Working with a Fixed Resonance Frequency

Drive Mode Control for MEMS Gyroscopes with Electrostatically Tunable Structure

Modeling and Simulation of Micromachined Gyroscope

A MEMS Vibratory Gyroscope With Real-Time Mode-Matching and Robust Control for the Sense Mode

Noise Analysis and Modeling for a Digital Control Architecture for Lissajous Frequency-Modulated MEMS Gyroscope with Amplitude-Modulated Readout

A Digital Control Structure for Lissajous Frequency-Modulated Mode MEMS Gyroscope

Constant-frequency Oscillation Control for Vibratory Micro-Machined Gyroscopes

Analysis on Digital Automatic Gain Control of MEMS Gyro Driven-Loop Circuit

IN-SITU MODE-MATCHING CONTROL FOR A SINGLE-CHIP HORIZONTAL DUAL-AXIS MEMS GYROSCOPE BASED ON MODULATING QUADRATURE COUPLING WITH SILICON GRATINGS

An Automatic Real-Time Mode-Matching MEMS Gyroscope with Fuzzy and Neural Network Control

MEMS Gyroscope Automatic Real-Time Mode-Matching Method Based on Phase-Shifted 45° Additional Force Demodulation

An In-Run Automatic Mode-Matching Method With Amplitude Correction and Phase Compensation for MEMS Disk Resonator Gyroscope

Design of a digital closed control loop for the sense mode of a mode-matching MEMS vibratory gyroscope

The design and implementation of interface electronics for silicon micromechanical gyroscopes

A Real-Time Automatic Mode-Matching Method Based on Phase-Shifted Virtual Coriolis Force for MEMS Disk Resonator Gyroscope

A novel oscillation control for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation technique