THE STRUCTURE OF TiO2 AND SiO2 OPTICAL COATINGS PREPARED BY SOL-GEL METHOD

Xiaoyun Hu,Yinsui Zhou,Aihua Gao,Luan Xi,Zhiguo Lu
IF: 0.6
2000-01-01
ACTA PHOTONICA SINICA
Abstract:In this paper,TiO2 and SiO2 sol-gel optical coatings' element,structure,surfacemorphology and light scatter properties under different process and low heat treatment temperature are investigated.AES result shows,in the alternative TiO2 and SiO2 multi-layer interference coatings,there's a small quantity of Si and Ti diffused into each other's side at their interface and Ti-O-Si(or Si-O-Ti)chemical bond is formed in the layer's interface region.Either TiO2 or SiO2 film has a high content of carbon that is caused by the character of sol-gel process.AFM result shows,sol-gel TiO2 single layer films' surface morphology has an apparent shape like column.The films' surface undulation is about 7.5nm.The surface scattering loss of the coatings increases with increasing annealing temperature,the film made from sol of different aging time has different scatting loss.
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