Abstract:Background: Focused Ion Beam (FIB) nanofabrication technology has an important status in micro-nano manufacturing technology for its advantages of direct writing, nanoscale fabrication, SEM in-situ observation, high reproducibility, and 3D complex micro/nanofabriction, etc. This review aims to present some recent developments in Focused Ion Beam and its application in nanotechnology.Methods: The new developments of FIB equipment and their performance were introduced. The FIB fundamental research of ion-sample interaction, FIB application in material properties study at the micro/nanoscale and 3D nanostructures fabrication were presented and discussed.Results: Seventy papers were included in the review. The developments of new ion sources of Xe plasma FIB and helium ion (He+) microscopy and their performances were introduced, which can offer higher material removal rate of similar to 100 times faster than traditional Ga+ source FIB and fabrication of sub-10 nm scales structures, respectively. Then, the fundamental research of FIB induced modification on substrate material has studied by methods of microscopy characterization, molecular dynamics (MD) simulation and FIB induced material redistribution (Rayleigh-Plateau instability). Finally, FIB application in material properties study at the micro/nanoscale and 3D nanostructures fabrication were discussed.Conclusion: The findings of this review confirm the importance of FIB nanofabrication and its applications in delicate 3D nanostructures, functional devices and material fundamental research, etc. With the developments of FIB advanced equipment and ion-sample interaction mechanism research, FIB technique can give more and more contributions to nanotechnology.

Focused-ion-beam stress introducing technology for micro/nano-fabrications

Focused-ion-beam-introduced Stress As a Driving Force for Three-Dimensional Micro/nano-Assembly

Focused ion beam (FIB) nano-machining and FIB Moire technique for strain analysis in MEMS/NEMS structures and devices

Self-marked preparation of site-specific transmission electron microscope lamellae of nanodevices using focusing ion beam technique.

Strain analysis in MEMS/NEMS structures and devices by using focused ion beam system

Advances of Focused Ion Beam in Micromachining Technology

Recent Developments in Focused Ion Beam and Its Application in Nanotechnology

Fabrication of Micro and Nanostructures by Focused Ion Beam

Focused Ion Beam Machining And Deposition

Focused Ion Beam Nano-Machined Structures for Strain Analysis by A Moiré Technique

Focused Ion Beam Nano-Precision Machining for Analyzing Photonic Structures in Butterfly

The 3D Controllable Fabrication of Nanomaterials with FIB-SEM Synchronization Technology

Focused Ion Beam Assisted Interface Detection for Fabricating Functional Plasmonic Nanostructures

3D Nanohelix Fabrication and 3D Nanometer Assembly by Focused Ion Beam Stress-Introducing Technique

Ultra-fine Nanofabrication by Hybrid of Energetic Ion Induced Fluidization and Stress

Experimental Study of Three-Dimensional Microfabrication by Focused Ion Beam Technology

Principle, Application and Development of Focused Ion Beam System

The Trends of in Situ Focused Ion Beam Technology: Toward Preparing Transmission Electron Microscopy Lamella and Devices at the Atomic Scale

A Programmable Nanofabrication Method for Complex 3D Meta-Atom Array Based on Focused-Ion-Beam Stress-Induced Deformation Effect

Three-Dimensional in Situ Electron-Beam Lithography Using Water Ice.

Nanoscale 3D tomography by in-flight fluorescence spectroscopy of atoms sputtered by a focused ion beam