The 3D Controllable Fabrication of Nanomaterials with FIB-SEM Synchronization Technology

Lirong Zhao,Yimin Cui,Junyi Li,Yuxi Xie,Wenping Li,Junying Zhang

DOI: https://doi.org/10.3390/nano13121839

IF: 5.3

2023-06-11

Nanomaterials

Abstract:Nanomaterials with unique structures and functions have been widely used in the fields of microelectronics, biology, medicine, and aerospace, etc. With advantages of high resolution and multi functions (e.g., milling, deposition, and implantation), focused ion beam (FIB) technology has been widely developed due to urgent demands for the 3D fabrication of nanomaterials in recent years. In this paper, FIB technology is illustrated in detail, including ion optical systems, operating modes, and combining equipment with other systems. Together with the in situ and real-time monitoring of scanning electron microscopy (SEM) imaging, a FIB-SEM synchronization system achieved 3D controllable fabrication from conductive to semiconductive and insulative nanomaterials. The controllable FIB-SEM processing of conductive nanomaterials with a high precision is studied, especially for the FIB-induced deposition (FIBID) 3D nano-patterning and nano-origami. As for semiconductive nanomaterials, the realization of high resolution and controllability is focused on nano-origami and 3D milling with a high aspect ratio. The parameters of FIB-SEM and its working modes are analyzed and optimized to achieve the high aspect ratio fabrication and 3D reconstruction of insulative nanomaterials. Furthermore, the current challenges and future outlooks are prospected for the 3D controllable processing of flexible insulative materials with high resolution.

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology,chemistry

What problem does this paper attempt to address?

### What problem does this paper attempt to solve?

This paper primarily explores the application of focused ion beam (FIB) and scanning electron microscope (SEM) synchronization technology in the 3D controllable fabrication of nanomaterials. Specifically:

1. **Technical Background**:
- Nanomaterials, due to their unique physical and chemical properties, have broad application prospects in fields such as microelectronics, biomedicine, and aerospace.
- The high resolution and multifunctionality (such as etching, deposition, and doping) of FIB technology have led to its widespread application in the 3D fabrication of nanomaterials in recent years.

2. **Research Focus**:
- The paper provides a detailed introduction to the working principles of FIB technology, including the ion optical system, operating modes, and integration with other systems.
- Special attention is given to how the FIB-SEM synchronization system achieves 3D controllable fabrication of nanomaterials ranging from conductive to semiconductor to insulator.
- For conductive nanomaterials, the study investigates high-precision FIB-induced deposition (FIBID) 3D patterning and nano-origami.
- For semiconductor nanomaterials, the focus is on achieving high-resolution and controllable 3D etching and nano-origami.
- For insulator nanomaterials, the analysis and optimization of FIB-SEM parameters and operating modes are conducted to achieve high aspect ratio 3D reconstruction.

3. **Current Challenges and Future Prospects**:
- The paper also discusses the current challenges and envisions the future development trends of high-resolution 3D controllable fabrication of flexible insulating materials.

Through these studies, the paper aims to demonstrate the potential and advantages of FIB-SEM synchronization technology in the 3D fabrication of nanomaterials.