Abstract:Advanced micro/nanofabrication of functional materials and structures with various dimensions represents a key research topic in modern nanoscience and technology and becomes critically important for numerous emerging technologies such as nanoelectronics, nanophotonics and micro/nanoelectromechanical systems. This review systematically explores the non-conventional material processing approaches in fabricating nanomaterials and micro/nanostructures of various dimensions which are challenging to be fabricated via conventional approaches. Research efforts are focused on laser-based techniques for the growth and fabrication of one-dimensional (1D), two-dimensional (2D) and three-dimensional (3D) nanomaterials and micro/nanostructures. The following research topics are covered, including: 1) laser-assisted chemical vapor deposition (CVD) for highly efficient growth and integration of 1D nanomaterial of carbon nanotubes (CNTs), 2) laser direct writing (LDW) of graphene ribbons under ambient conditions, and 3) LDW of 3D micro/nanostructures via additive and subtractive processes. Comparing with the conventional fabrication methods, the laser-based methods exhibit several unique advantages in the micro/nanofabrication of advanced functional materials and structures. For the 1D CNT growth, the laser-assisted CVD process can realize both rapid material synthesis and tight control of growth location and orientation of CNTs due to the highly intense energy delivery and laser-induced optical near-field effects. For the 2D graphene synthesis and patterning, room-temperature and open-air fabrication of large-scale graphene patterns on dielectric surface has been successfully realized by a LDW process. For the 3D micro/nanofabrication, the combination of additive two-photon polymerization (TPP) and subtractive multi-photon ablation (MPA) processes enables the fabrication of arbitrary complex 3D micro/nanostructures which are challenging for conventional fabrication methods. Considering the numerous unique advantages of laser-based techniques, the laser-based micro/nanofabrication is expected to play a more and more important role in the fabrication of advanced functional micro/nano-devices.

Nanofabrication Approaches for Functional Three-Dimensional Architectures

Three-Dimensional Micro/Nanoscale Architectures: Fabrication and Applications

Freestanding 3D Mesostructures, Functional Devices, and Shape‐Programmable Systems Based on Mechanically Induced Assembly with Shape Memory Polymers

Multiple-Patterning Nanosphere Lithography for Fabricating Periodic Three-Dimensional Hierarchical Nanostructures.

3D Nanofabrication via Directed Material Assembly: Mechanism, Method, and Future

Printing, folding and assembly methods for forming 3D mesostructures in advanced materials

Laser-based Micro/nanofabrication in One, Two and Three Dimensions

A Mechanically Driven Form Of Kirigami As A Route To 3d Mesostructures In Micro/Nanomembranes

Three-dimensional nanofabrication via ultrafast laser patterning and kinetically regulated material assembly

Assembly of Advanced Materials into 3D Functional Structures by Methods Inspired by Origami and Kirigami: A Review

Three-dimensional mesostructures as high-temperature growth templates, electronic cellular scaffolds, and self-propelled microrobots

A 3D Self-Shaping Strategy for Nanoresolution Multicomponent Architectures

Three-dimensional Macro-Structures of Two-Dimensional Nanomaterials.

2D Materials Nanoarchitectonics for 3D Structures/Functions

Mechanical Assembly of Complex, 3D Mesostructures from Releasable Multilayers of Advanced Materials

Micro/Nanoscale 3D Assembly by Rolling, Folding, Curving, and Buckling Approaches

Directed Assembly of Nanomaterials for Making Nanoscale Devices and Structures: Mechanisms and Applications

Three-dimensional Architectures Constructed Using Two-Dimensional Nanosheets

Nanomembrane-assembled Nanophotonics and Optoelectronics: from Materials to Applications

3D Nanofabrication via Chemo-Mechanical Transformation of Nanocrystal/Bulk Heterostructures.

Nanomaterial Patterning in 3D Printing