Abstract:Moiré fringes are used throughout a wide variety of applications in physics and engineering to bring out small variations in an underlying lattice by comparing with another reference lattice. This method was recently demonstrated in scanning transmission electron microscopy imaging to provide local strain measurement in crystals by comparing the crystal lattice with the scanning raster that then serves as the reference. The images obtained in this way contain a beating fringe pattern with a local period that represents the deviation of the lattice from the reference. In order to obtain the actual strain value, a region containing a full period of the fringe is required, which results in a compromise between strain sensitivity and spatial resolution. In this paper we propose an advanced setup making use of an optimised scanning pattern and a novel phase stepping demodulation scheme. We demonstrate the novel method on a series of 16 nm Si–Ge semiconductor FinFET devices in which strain plays a crucial role in modulating the charge carrier mobility. The obtained results are compared with both Nano-beam diffraction and the recently proposed Bessel beam diffraction technique. The setup provides a much improved spatial resolution over conventional moiré imaging in STEM while at the same time being fast and requiring no specialised diffraction camera as opposed to the diffraction techniques we compare to.

Investigation of Strain in Microstructures by a Novel Moire Method

Focused Ion Beam Nano-Machined Structures for Strain Analysis by A Moiré Technique

Strain analysis in MEMS/NEMS structures and devices by using focused ion beam system

Micro-deformation measurement using focused ion beam moiré method

Focused Ion Beam Moiré Method

Phase Shifting Focused Ion Beam Moiré Method

Strain measurement in semiconductor FinFET devices using a novel moiré demodulation technique

A Micro-Scale Strain Rosette for Residual Stress Measurement by SEM Moiré Method

Large-deformation analysis in microscopic area using micro-moiré methods with a focused ion beam milling grating

Investigation of strain in individual multi-walled carbon nanotube by a novel moiré method

Focused-ion-beam stress introducing technology for micro/nano-fabrications

3D Strain Measurement of Heterostructures Using the Scanning Transmission Electron Microscopy Moiré Depth Sectioning Method

Residual Stress Measurement on a MEMS Structure With High-Spatial Resolution

3D Strain Measurement of Heterostructures Using the Scanning Transmission Electron Microscopy Moire Depth Sectioning Method

A novel nano-Moiré method with scanning tunneling microscope (STM)

Fabrication of Micro-Moiré Gratings on a Strain Sensor Structure for Deformation Analysis with Micro-Moiré Technique

FIB Moiré Gratings and Their Application in the Measurement of Optical Fibers' Mechanical Properties

Deformation analysis in microstructures and micro-devices

Micro-moiré methods with high resolution microscopes and their applications

Micro/nano moire methods

Experimental study on nanometer moire method