Control of high-precision magnetic levitation positioning stage

He-Hong ZHANG,Zhi-Qiang LONG
DOI: https://doi.org/10.13524/j.2095-008x.2015.03.052
2015-01-01
Abstract:High-precision stage is the key component in the scene of micro-technology including photoetching machine , nano-measurement , process and micro-assemble , etc . Magnetic levitation positioning becomes the hot topic in positioning technology due to using non-contact maglev technology in motion stage and driving part , which can eliminate friction and attrition to motion and improve the precision . The development and researches of magnetic positioning stage in China and abroad are introduced and a new structure of magnetic levitation positioning stage is presented . Considering the uncertainty of the model and gap and load disturbance ,active disturbance rejection control is proposed to maglev positioning stage for the problem of stable levitation control based on the single magnet model .The simulation and experiments show that the method meets the demands of high-precision and stable levitation control and has the strong ability of robust anti-disturbance .
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