Ultra Precision Stages

吴鹰飞,周兆英

2002-01-01

Abstract:Ultra precision stages are indispensable in a lot of high technical fields. The principles, performances and applications of magnetic stages, linear motor stages, piezodriven stages, friction driven stages, MEMS stages and other stages are introduced. The relative merits of stages are analyzed. The right type of stage could be chosen based on the application.

What problem does this paper attempt to address?

The Ultra-precision Machining Technology and It' Domestic and International Progress

Yong He

2001-01-01

Abstract:In this paper the range,machining method and system structure of the ultra-precision machining technology are discussed. Some key problems for improving accuracy of the ultra-precision machining are discussed deeply.As viewed from machining accuracy,the domestic and international developing trends and goals are analyzed.
Research and Development of Ultra-precision Magnetic Stage

LI Heng,ZHU Yu,JIA Song-tao,WU Chen-guang

DOI: https://doi.org/10.3969/j.issn.1002-6886.2007.02.001

2007-01-01

Abstract:This paper introduced principle of ultra-precision magnetic stage,investigated status of research and application both domestic and overseas.In order to solve the problems of resent research of this field,some possible research direction of ultra-precision magnetic stage are discussed.
RESEARCH ON ULTRA-PRECISION STAGES OF LITHOGRAPHY

朱煜,尹文生,段广洪

DOI: https://doi.org/10.3969/j.issn.1004-4507.2004.02.006

2004-01-01

Abstract:Researches about ultra-precision stages of stepper and scanner lithography are introduced.In the ultra-precision motion control stage built for experiments,linear guide air bearing,linear motors and linear encodes are adopted to make up of two parallel linear coarse motion systems.Lorentz motors drive fine stages with air bearing folded on the coarse motion systems.The dual-frequency laser interferometer completes the ultra-precision position detection and feedback.The two linear motion systems can realize the research of the synchronism scan motion and compose manifold x-y ultra-precision motion systems.The ultra-precision motion tests based on the test-stage are introduced and the motion positioning preci-sion has realized12nm.
Preliminary Exploration on Control Theory of Ultraprecision Stage with Large Travel

Liang Shi,Bin Lin

DOI: https://doi.org/10.4028/www.scientific.net/amm.37-38.895

2010-01-01

Applied Mechanics and Materials

Abstract:With the development of science and manufacturing technology, the whole performance of precision machining stage system with high precision and high resolution directly influences the accuracy of precision and ultraprecision cutting process, fine measurement accuracy and GSI manufacturing level. Actually, linear motion of worktable refers to the linear motor movers positioning. The main contribution of this paper is the development of a mathematical model based on precision stage control system, in accordance with the principle of linear motor and PID control. The simulation results of unit-feedback position PID control, velocity PID control, position and velocity dual loop feedback control are presented and analyzed separately in SIMULINK toolbox of MATLAB to discuss the proposed control outcome in detail.
Research of the High Dynamic Performance Moving Parts on Ultra-precision Stage

徐登峰,赵冶

DOI: https://doi.org/10.3969/j.issn.1005-2402.2009.07.016

2009-01-01

Abstract:With the continuous improvement of velocity,acceleration and positioning accuracy of ultra-precision stage,there are high requirements not only on the control system but also on the moving parts' modes.This paper addresses such stage to raise moving components' modes through ceramic study.First,ceramic and aluminum alloy components mode differences are analyzed through simplified model,and it can be concluded that ceramic components can greatly increase the moving parts' mode.Then,the issue of designing ceramic components is discussed by theoretical mode analysis and experimental mode analysis.And a preliminary high frequency signal following experiment is conducted to test the motion system's bandwidth.Finally,the author sums up the experience of design,manufacturing and assembly during this process and lay the foundation for the future in-depth study.
Design of a Three Dimensions Ultra Precision Stage

YANG Guozhe,WANG Liping,YU Dingwen,LIU Xiangyang

DOI: https://doi.org/10.3969/j.issn.1001-3881.2006.06.001

2006-01-01

Abstract:On ultra precision cutting,grinding and non-traditional machining,there is a hard problem between long travel and high precision,especially in multi-coordinate machining.Aimed at tri-coordinate ultra precision machining,a stage used for tri-coordinate non-traditional machining was designed,which realizes long travel tri-coordinate ultra precision machining.The stage is also the base of designing ultra precision machine tools.
A piezodriven three dimensional micropositioning stage for nano-manufacturing

Wen Wang,Robert J. Hocken,Zhu Zhu,Zichen Chen

2010-01-01

Abstract:Multiple dimensional micropositioning stages are key components in many fields including nanomanufacturing, precision instruments, biological manipulation, medical imaging and etc., in which the stages are usually demanded to provide up to hundreds of microns range and nearly nanometer scale resolution at multiple axial directions simultaneously. Meanwhile the devices' size are also restricted because of limited space. In this paper a three dimensional micropositioning stage with flexure hinges supporting and piezo actuators driving to generate displacements is presented. The structure of the stage is introduced and the working principle of stage is described. Analysis has been done via Finite Element Analysis (FEA) and parameters of the flexure hinges were selected. The computational results show that the stage has resonant frequencies of hundreds of Hertz with an over 500 grams working load, and the travlling range can reach up to hundreds of microns in X and Y directions. A prototype was fabricated and a primary test has been doing to verify the feasibility of design.
Design and Verification of an XYZ Three-axis Micro Stage

Keisuke ADACHI,Takuma SUGAWARA,Yuki SHIMIZU,Yuan-Liu CHEN,Wei GAO,Eiji NIWA,Yoshihiro SASAKI

DOI: https://doi.org/10.1299/jsmelem.2017.9.073

2017-01-01

Proceedings of International Conference on Leading Edge Manufacturing in 21st century LEM21

Abstract:This paper presents a design study of an XYZ three-axis micro stage which achieves a size of several cubic centimeters, a millimetric travel range, a nanometric driving resolution and three-axis motion at the same time. In addition, unique leaf springs acting not only as guides for a stage table but also as precision displacement sensors are included in the stage system. The XYZ three-axis micro stage is designed and fabricated. The fabricated stage is designed to have a small size of 25 mm (X) × 25 mm (Y) × 6.5 mm (Z). Furthermore, feasibility of the driving principle of the developed XYZ three-axis micro stage is verified in experiments.
Study on Step Magnifying Mechanism of Precise Planar Micro-Positioner

邹伟,戴惠良,钟建安

DOI: https://doi.org/10.3969/j.issn.1009-444x.2008.03.007

2008-01-01

Abstract:Step-magnifying mechanism of planar micro-positioner has been presented through using a level enlarging mechanism and a double-nesting structure to design a flexible hinge structure for enlarging the displacement range of piezoelectric ceramics on two directions and feeding step length,and at the same time reducing the response time.To do so,it is necessary to choose the enlarging lever reasonably and optimize the design of the overall structure.
Design And Analysis Of Two Dimensional X-Y Micropositioning Stage

Wang Wen,Zhu Zhu,Chen Zichen

DOI: https://doi.org/10.1117/12.885293

2010-01-01

Abstract:This paper presents a novel piezodriven X-Y stage utilizing flexure hinges. Levers of high amplifying rate were adopted to magnify the output displacement of the piezoelectric actuator and a complex parallel four-bar mechanism was used to guide the mobile platform. In order to describe the static and dynamic behaviour of the stage, an analytical model was built and a series of formulae were deduced. Based on mathematical analysis, the configuration of the stage was optimized. Then Finite Element Analysis was applied to analyze travel ranges, natural frequencies and stress distribution. The simulation computation results demonstrate that the stage could reach a motion range of 200 mu m by 200 mu m and has a first order natural frequency of 265 Hertz, which is of good concordance with the theoretical estimate. Now a prototype is being fabricated.
FleXstage: Lightweight Magnetically Levitated Precision Stage with Over-Actuation towards High-Throughput IC Manufacturing

Jingjie Wu,Lei Zhou

2023-09-21

Abstract:Precision motion stages play a critical role in various manufacturing and inspection equipment, for example, the wafer/reticle scanning in photolithography scanners and positioning stages in wafer inspection systems. To meet the growing demand for higher throughput in chip manufacturing and inspection, it is critical to create new precision motion stages with higher acceleration capability with high control bandwidth, which calls for the development of lightweight precision stages. However, in today's precision motion systems, only the rigid body motion of the system are under control, and the flexible dynamic systems are in open loop. For these systems, the motion control bandwidth is limited by the first structural resonance frequency of the stage, which enforces a fundamental trade-off between the stage's bandwidth and acceleration capability. Aiming to overcome this trade-off, we have introduced a sequential structure and control design framework for lightweight stages with the low-frequency flexible modes of the stage are under active control. To facilitate the controller design, we further propose to minimize the resonance frequency of the stage's mode being controlled and to maximize the resonance frequency of the uncontrolled mode. The system's control bandwidth is placed in between the resonance frequencies. This paper presents the design, optimization, building, and experimental evaluations for a lightweight magnetically levitated planar stage, which we call FleXstage, with first flexible mode actively controlled via over-actuation. Simulations show the proposed design is highly promising in enabling stages with lightweight without sacrificing control bandwidth. We have some preliminary results now and are still working on the experimental evaluations for the closed-loop system, and will present the results in the oral presentation.

Systems and Control
Three-degrees-of-freedom Precision Stage

YF Wu,ZY Zhou

DOI: https://doi.org/10.1117/12.483169

2002-01-01

Abstract:Precision positioning and fine motion are needed in many fields, such as micro electromechanical system, ultra-precision machine, optical alignment and integrated circuit manufacture, so it is indispensable to develop precision planar stage. A precision stage driven by one piezoactuator is made to achieve three degrees of freedom motion in plane. To realize precision positioning, movement of the stage should be detected and corresponding control scheme should be designed. A displacement detection system based on image processing is developed to measure three degrees of freedom displacement of the planar stage. The core parts of the system are CCD camera, microscope, image collection and image processing. Large rotation of the planar stage has no influence on displacement detection of the system. The system could obtain high resolution together with relatively large detection range. Performance of the planar stage is tested by the displacement detection system. Interference movements of the stage are less than the main movements. Movements of the planar stage in any direction are obtained by logical open-loop control. Micro motions detected by laser interferometer indicate the stage has very high resolution. Key words: precision positioning, planar stage; three degrees of freedom motion, displacement detection system based on image processing, high resolution.
Design, Control of an Aerostatic X-Y Planar Motion Stage for Precision Positioning

Dongdong Yu,Kaiming Yang,Yu Zhu,Xin Li,Leqing Cui

DOI: https://doi.org/10.1109/ICEICE.2012.1345

2012-01-01

Abstract:Recently the manufacturing industry has seen increasing demand for micro-components in biomedical, opto-mechatronics, and automotive applications. In particular, a positioning table system combining high accuracy with high speed over large travel ranges. However, the traditional stage constructed by stacking one-axis stages to achieve multiple degrees of freedom motion, are no longer a viable solution to meet the tighter tolerances required by the customers. In order to meet these demands simultaneously, the paper proposes an aerostatic X-Y planar motion stage featuring high resolution (80nm), long stroke, non-contact moving, lightweight and compact structure. It employs a slider consisting of four three-phase coils, which can move along the surface of a standard hal bach permanent magnetic array in a non-contact condition due to being elevated with air bearing. Furthermore, control system is designed including feedback and feed forward controllers. To further improve the tracking performance and eliminating recurrent disturbances, iterative learning control is employed. Performance evaluation results show that the developed planar motion stage can realize a remarkable performance which includes fast settling time and micrometer positioning with high speed over large ranges.
Six-DOF maglev nano precision microstage development

Guang Li,Yu Zhu,Ming Zhang,Guanghong Duan,Masayoshi Tomizuka

DOI: https://doi.org/10.1109/MACE.2010.5536247

2010-01-01

Abstract:Nanometer precision micromotion stage is a critical instrument for nanotechnology and is widely applied in semiconductor lithography and modern microfabrication machines. This paper focuses on the latest development of six-degree-of-freedom (six-DOF) magnetic levitation nanometer precision microstage and its actuating and bearing technology. Compared with the traditional stage, the maglev microstage has simple structure and better dynamic performance. As without friction, deformation and vibration problems, the six-DOF maglev microstage will be further applied and explored in nanometer precision motion systems. ©2010 IEEE.
Super-precision positioning stage with nanometer resolution

林德教,吴健,殷纯永

DOI: https://doi.org/10.3321/j.issn:1002-1582.2001.06.031

2001-01-01

Abstract:The precision positioning stage utilizing flexure hinges takes the numerous advantages of direct transmission, no friction, no backlash, compactness, satisfactory stiffness and high resolution. This paper develops a novel positioning stage with large transmission ratio, introduces the system structure and basic principle, analyzes its performance of stiffness. A dual-frequency interferometer is employed to evaluate the feature of the stage driven by piezoelectric ceramic(PZT). The experimental results show that the stage has the resolution and positioning accuracy of nanometer order.
Modeling and analyzing for ultra-precision coarse-fine stage

Yang,Yibo,Yin,Wensheng,Zhu,Yu,Wang,Chunhong

2008-01-01

Abstract:This paper discussed the model of air-bearing coarse-fine positioning stage.It analysed the positioning and force coupling as well as the model's change during the mass ratio of coarse stage to fine stage changing.Moreover this paper analysed the controllability and observability using the matrix-fraction description.And a MIMO LQG controller was designed based on this coarse-fine stage model.The result of the simulation shows that the MIMO LQG controller can effectively restrain the coupling and improve the positioning property.
Transcending the Acceleration-Bandwidth Trade-off: Lightweight Precision Stages with Active Control of Flexible Dynamics

Jingjie Wu,Lei Zhou

2023-09-26

Abstract:Micro/Nano-positioning stages are of great importance in a wide range of manufacturing machines and instruments. In recent years, the drastically growing demand for higher throughput and reduced power consumption in various IC manufacturing equipment calls for the development of next-generation precision positioning systems with unprecedented acceleration capability while maintaining exceptional positioning accuracy and high control bandwidth. Reducing the stage's weight is an effective approach to achieving this goal. However, the reduction of stages' weight tends to decrease its structural resonance frequency, which limits the closed-loop control bandwidth and can even cause stability issues. Aiming to overcome the aforementioned challenge and thus create new lightweight precision stages with substantially improved acceleration capability without sacrificing stage control performance, this research presents a novel sequential structure and control design framework for lightweight stages with low-frequency flexible modes of the stage being actively controlled. Additional actuators and sensors are placed to actively control the flexible structural dynamics of the lightweight stage to attain high control bandwidth. A case study is simulated to evaluate the effectiveness of the proposed approach, where a stage weight reduction of 24% is demonstrated compared to a baseline case, which demonstrates the potential of the proposed design framework. Experimental evaluation of the designed stage's motion performance will be performed on a magnetically levitated linear motor platform for performance demonstration.

Systems and Control
Study on Data Processing Method of High Precision Micro-tensile Stage

陈代谢,初明璋,林云生,韩立,张跃飞,毛圣成

2011-01-01

Abstract:To deal with the problem of large system error of the micro-tensile stage and improve its measurement accuracy, several data processing methods are studied in this paper. Through the design of high speed and high accuracy data acquisition system, comparing the linear regression, polynomial fitting, subsection fitting and point-by-point comparison methods, the author can get the advantages and disadvantages of these methods in system error correction. All d dealt on line. Experimental measurement accuracy for the ata processing methods can be realized by VC ＋＋ results show that flexible use of these methods micro-tensile stage programming and also can be can effectively improve the
Research on Self-calibration of Ultra-precision Stages Applied in IC Fabrication and Inspection Devices

Yu ZHU,Li-wei ZHU,Wen-sheng YIN,Guang-hong DUAN

DOI: https://doi.org/10.3969/j.issn.1004-4507.2005.03.005

2005-01-01

Abstract:Based on the introduction of the stage self-calibration literatures-and according to the rigid motion equations and the non-linear optimization method-this paper provides an algorithm for self-calibration of the ultra-precision stages. Simulation results show that the proposed algorithm can realize the calibration and the calibration accuracy is free from artifact imperfection and only affected by random measurement errors encountered during the process of calibration.
LevCube: A six-degree-of-freedom magnetically levitated nanopositioning stage with centimeter-range XYZ motion

Ian L. Heyman,Jingjie Wu,Lei Zhou

DOI: https://doi.org/10.1016/j.precisioneng.2023.04.008

IF: 3.315

2023-04-27

Precision Engineering

Abstract:Among various types of precision stages, magnetically levitated precision positioning stages offer unique capabilities including frictionless motion, vacuum compatibility, and contamination-free operation, making them highly attractive for various applications such as photolithography scanners, micro-machining tools, and microscopes. However, today's magnetically levitated stages often only offer long-stroke motion in the planar directions, and typically have a limited motion range in the vertical axis. This fact limits their applicability in machines and instruments that require precision motion in all translational degrees of freedom (DOFs). Aiming to address this challenge, this paper presents the design, modeling, prototyping, and experimental evaluations for a novel magnetically levitated nanopositioning stage, which we call the LevCube, that can provide nano-precision positioning with a motion stroke of 10 mm in all translational DOFs. The LevCube prototype stage was successfully levitated with a positioning control bandwidth of 100 Hz in the translational DOFs and 70 Hz in the rotational DOFs. The maximum force of the stage is 25.5 N under 3.5 A current amplitude, which generates a maximum stage acceleration of 2.5 times the gravitational acceleration. These performances show the potential of the proposed stage to provide all-axis long-stroke precision positioning capability for future microscopes and manufacturing machines.

engineering, manufacturing,nanoscience & nanotechnology, multidisciplinary,instruments & instrumentation

Ultra Precision Stages

The Ultra-precision Machining Technology and It' Domestic and International Progress

Research and Development of Ultra-precision Magnetic Stage

RESEARCH ON ULTRA-PRECISION STAGES OF LITHOGRAPHY

Preliminary Exploration on Control Theory of Ultraprecision Stage with Large Travel

Research of the High Dynamic Performance Moving Parts on Ultra-precision Stage

Design of a Three Dimensions Ultra Precision Stage

A piezodriven three dimensional micropositioning stage for nano-manufacturing

Design and Verification of an XYZ Three-axis Micro Stage

Study on Step Magnifying Mechanism of Precise Planar Micro-Positioner

Design And Analysis Of Two Dimensional X-Y Micropositioning Stage

FleXstage: Lightweight Magnetically Levitated Precision Stage with Over-Actuation towards High-Throughput IC Manufacturing

Three-degrees-of-freedom Precision Stage

Design, Control of an Aerostatic X-Y Planar Motion Stage for Precision Positioning

Six-DOF maglev nano precision microstage development

Super-precision positioning stage with nanometer resolution

Modeling and analyzing for ultra-precision coarse-fine stage

Transcending the Acceleration-Bandwidth Trade-off: Lightweight Precision Stages with Active Control of Flexible Dynamics

Study on Data Processing Method of High Precision Micro-tensile Stage

Research on Self-calibration of Ultra-precision Stages Applied in IC Fabrication and Inspection Devices

LevCube: A six-degree-of-freedom magnetically levitated nanopositioning stage with centimeter-range XYZ motion