Research and Development of Ultra-precision Magnetic Stage

LI Heng,ZHU Yu,JIA Song-tao,WU Chen-guang
DOI: https://doi.org/10.3969/j.issn.1002-6886.2007.02.001
2007-01-01
Abstract:This paper introduced principle of ultra-precision magnetic stage,investigated status of research and application both domestic and overseas.In order to solve the problems of resent research of this field,some possible research direction of ultra-precision magnetic stage are discussed.
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