Theoretical analysis and modeling of a magnetic levitation micromotion stage

Chen Benyong,Lei Yong,Li Yanbao,Zhang Liqiong,Wang Junru,Feng Ping
DOI: https://doi.org/10.3321/j.issn:0254-3087.2006.09.034
2006-01-01
Abstract:Magnetic levitation stage is easy to realize micromotion with nanometer resolution because the contact-free magnetic levitation technique is used between the moving plate and the driving part. In this paper, a novel magnetic levitation micromotion stage is proposed, the movement mechanism of the stage is theoretically analyzed in detail, and the electromagnetic driving model of the stage is presented. The stage motion control was simulated with Matlab software. The theoretical analysis and simulation result show that the designed magnetic levitation micromotion stage can realize nanometer scale micromotion. The suggested mathematic model offers a theoretical foundation for the design and control of magnetic levitation stage.
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