A Magnetic Levitation Actuator For Micro-Assembly

Xiongying Ye,YuLong Huang,Zhaoying Zhou,Quan Li,Qiulian Gong
DOI: https://doi.org/10.1109/sensor.1997.635220
1997-01-01
Abstract:An actuator using magnetic levitation for micro-assembly is proposed. The magnetic levitation actuator, which Is composed of three layers of silicon structures and a permanent magnet, has been fabricated using micromachining technology and assembled. The top layer consists of a groove and many pairs of small square coils which are used to generate driving forces. The middle layer consists of a groove which compose the moving guide of the permanent magnet with that of top layer. A long rectangle coil is built on the bottom layer, which is used to generate a levitating force. Simulation results show that the magnetic levitation actuator works effectively.
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