Six-DOF maglev nano precision microstage development

Guang Li,Yu Zhu,Ming Zhang,Guanghong Duan,Masayoshi Tomizuka

DOI: https://doi.org/10.1109/MACE.2010.5536247

2010-01-01

Abstract:Nanometer precision micromotion stage is a critical instrument for nanotechnology and is widely applied in semiconductor lithography and modern microfabrication machines. This paper focuses on the latest development of six-degree-of-freedom (six-DOF) magnetic levitation nanometer precision microstage and its actuating and bearing technology. Compared with the traditional stage, the maglev microstage has simple structure and better dynamic performance. As without friction, deformation and vibration problems, the six-DOF maglev microstage will be further applied and explored in nanometer precision motion systems. ©2010 IEEE.