Development of Micromotion Stage with Nanoscale Resolution

Pingfa Feng

2006-01-01

Abstract:Micromotion stage is the key instrument of nano-tech, This paper summarizes the development of micromotion stage,analyzes and compares principle,capability,work range and precision of micromotin stage which has arisen.Based on it,gives the prospect of nanoscale precision micromotion stage.

What problem does this paper attempt to address?

A piezodriven three dimensional micropositioning stage for nano-manufacturing

Wen Wang,Robert J. Hocken,Zhu Zhu,Zichen Chen

2010-01-01

Abstract:Multiple dimensional micropositioning stages are key components in many fields including nanomanufacturing, precision instruments, biological manipulation, medical imaging and etc., in which the stages are usually demanded to provide up to hundreds of microns range and nearly nanometer scale resolution at multiple axial directions simultaneously. Meanwhile the devices' size are also restricted because of limited space. In this paper a three dimensional micropositioning stage with flexure hinges supporting and piezo actuators driving to generate displacements is presented. The structure of the stage is introduced and the working principle of stage is described. Analysis has been done via Finite Element Analysis (FEA) and parameters of the flexure hinges were selected. The computational results show that the stage has resonant frequencies of hundreds of Hertz with an over 500 grams working load, and the travlling range can reach up to hundreds of microns in X and Y directions. A prototype was fabricated and a primary test has been doing to verify the feasibility of design.
Design and Verification of an XYZ Three-axis Micro Stage

Keisuke ADACHI,Takuma SUGAWARA,Yuki SHIMIZU,Yuan-Liu CHEN,Wei GAO,Eiji NIWA,Yoshihiro SASAKI

DOI: https://doi.org/10.1299/jsmelem.2017.9.073

2017-01-01

Proceedings of International Conference on Leading Edge Manufacturing in 21st century LEM21

Abstract:This paper presents a design study of an XYZ three-axis micro stage which achieves a size of several cubic centimeters, a millimetric travel range, a nanometric driving resolution and three-axis motion at the same time. In addition, unique leaf springs acting not only as guides for a stage table but also as precision displacement sensors are included in the stage system. The XYZ three-axis micro stage is designed and fabricated. The fabricated stage is designed to have a small size of 25 mm (X) × 25 mm (Y) × 6.5 mm (Z). Furthermore, feasibility of the driving principle of the developed XYZ three-axis micro stage is verified in experiments.
Design And Analysis Of Two Dimensional X-Y Micropositioning Stage

Wang Wen,Zhu Zhu,Chen Zichen

DOI: https://doi.org/10.1117/12.885293

2010-01-01

Abstract:This paper presents a novel piezodriven X-Y stage utilizing flexure hinges. Levers of high amplifying rate were adopted to magnify the output displacement of the piezoelectric actuator and a complex parallel four-bar mechanism was used to guide the mobile platform. In order to describe the static and dynamic behaviour of the stage, an analytical model was built and a series of formulae were deduced. Based on mathematical analysis, the configuration of the stage was optimized. Then Finite Element Analysis was applied to analyze travel ranges, natural frequencies and stress distribution. The simulation computation results demonstrate that the stage could reach a motion range of 200 mu m by 200 mu m and has a first order natural frequency of 265 Hertz, which is of good concordance with the theoretical estimate. Now a prototype is being fabricated.
Six-DOF maglev nano precision microstage development

Guang Li,Yu Zhu,Ming Zhang,Guanghong Duan,Masayoshi Tomizuka

DOI: https://doi.org/10.1109/MACE.2010.5536247

2010-01-01

Abstract:Nanometer precision micromotion stage is a critical instrument for nanotechnology and is widely applied in semiconductor lithography and modern microfabrication machines. This paper focuses on the latest development of six-degree-of-freedom (six-DOF) magnetic levitation nanometer precision microstage and its actuating and bearing technology. Compared with the traditional stage, the maglev microstage has simple structure and better dynamic performance. As without friction, deformation and vibration problems, the six-DOF maglev microstage will be further applied and explored in nanometer precision motion systems. ©2010 IEEE.
A Novel Piezoelectrically Actuated 2-Dof Compliant Micro/Nano-Positioning Stage with Multi-Level Amplification

Wu-Le Zhu,Zhiwei Zhu,Yi Shi,Xiangfan Chen,Yu He,Kornel F. Ehmann,Bing-Feng Ju

DOI: https://doi.org/10.1063/1.4965880

IF: 1.6

2016-01-01

Review of Scientific Instruments

Abstract:This article presents a novel two-degrees-of-freedom (2-DoF) piezo-actuated parallel-kinematic micro/nano-positioning stage with multi-level amplification. The mirror symmetric stage consists of four leverage mechanisms, two Scott-Russell mechanisms, and a Z-shaped flexure hinge (ZFH) mechanism. Taking advantage of the ZFH mechanism, 2-DoF motions with final-level flexural amplification and decoupled motion guidance are achieved. Analytical models of the stage are developed and validated through finite element analysis to characterize its working performance. Practical testing of a prototype stage is conducted to demonstrate the design process and to quantify its response characteristics. Due to the utilized multi-level amplification, a practical amplification ratio of 13.0 is realized by the prototype. The decoupled output motion guidance feature of the stage makes it amenable for implementation in raster scanning type of measurements.
Design Research of a Novel High Speed Nanometer Positioning System on Macro/Micro Driven for MEMS

Degang Jie,Yanjie Liu,Lining Sun,Hegao Cai

DOI: https://doi.org/10.1109/icma.2006.257719

2006-01-01

Abstract:With the increasing demand of high speed and precision positioning system for the devices packaging in microelectromechanical system (MEMS), a novel high speed nanometer positioning XY stage system on macro/micro driven is presented in this paper. The stage integrates the advantage of macro stage driven by linear voice coil motor (VCM) such as long stroke and high speed, and the advantage of micro stage driven by piezoelectric actuator (PZT) such as high response and nanometer resolution. Adopting a novel elastic decoupling mechanism used to avoid the moving gap, the stage haves the entire decoupling characteristic in kinematics and control. Based on the analysis and optimization of the mechanism in high dynamic state, the XY stage prototype is manufactured. And based on the model of control system, the macro-micro control strategy with high speed and high accuracy is investigated. The simulation results verify that the system dynamic performance is significantly increased and the steady-state error is reduced to plusmn10 nm
Development of a compact and long range XYθ(z) nano-positioning stage.

D. Gweon,Hyunchang Kim

DOI: https://doi.org/10.1063/1.4740254

IF: 1.6

2012-08-08

Review of Scientific Instruments

Abstract:In this study, we describe the development of a novel, compact, and long range in-plane XYθ(z) nano-positioning stage with piezoelectric actuator and flexure mechanism. The stage is composed of an X-directional motion part and a Y, θ(z)-directional motion part, which are linked serially. The stage consists of a bridge-type amplifying mechanism for the amplification of deformation of the piezoelectric actuator, a double compound guide mechanism for performing only desired motion, and a circular hinge mechanism that permits rotational motion in the Y and θ(z)-stages. To set the design variables of the stage, optimal design is carried out. To verify the results of the optimal design process and the performance of the stage, the FEM simulation and experiment are carried out. The proposed XYθ(z) nano-positioning stage has a translational motion range of 700 μm and a rotational motion range of 0.3°; it has a closed-loop resolution of 5 nm, 5 nm, and 0.025 arcsec in the X-, Y-, and θ(z)-directional motions, respectively. The proposed stage is a novelty in that it has a compact size of 200 × 200 × 30 mm(3), and decoupled kinematic design.

Physics,Engineering,Medicine,Materials Science
Investigation on A Novel Dual-Grating Macro-Micro Driven High Speed Precision Positioning System for Nems

Li N. Sun,De G. Jie,Yan J. Liu,Zhi C. Chen,He G. Cai

DOI: https://doi.org/10.1109/nems.2006.334864

2006-01-01

Abstract:Microelectromechanical System (MEMS) is naturally continuing its downsizing into Nanoelectromechanical System (NEMS), but at the same time it is indispensable in the package equipment used for nano-devices packaging in NEMS manufacture. A novel dual-grating macro-micro driven high speed precision XY-stage positioning system is presented in this paper. Combining macro with micro actuator, a system of large workspace and high speed with high resolution of motion is developed. Two linear voice coil motors (VCM) are used into the macro motion, and two piezoelectric (PZT) driven micro stages of high frequency are mounted on each motor to compensate the position error. A novel elastic decoupling mechanism is used in the stage to avoid the moving gap. The coarse micron grating and the fine nanometer grating are integrated into the closed-loop feedback, which is used to measure the position of the output end of macro stage and micro stage. Adopting a complex method of the position of coarse/fine gratings, the nano-positioning with high speed of XY-stage is achieved. By using the mechanical dynamic simulation and finite element analysis (FEA) method, the decoupling mechanism and the micro mechanism are optimized, and the dynamic characteristics of the stage are investigated, which is based on the rigid-flexible dynamic analysis of mechanical system. The simulation results show that this new configuration allows a workspace of 25mmx25mm and an acceleration exceeding 100M/s(2) with a resolution of motion better than 10nm.
Design of a Novel Low-Cost and Long-Stroke Co-Planar Stage for NanopositioningNeuartiger preisgünstiger Zwei-Ebenen-Positioniertisch für die Nanopositionierung

Kuang-Chao Fan,Zhi-Yua Ke,Bai-Kun Li

DOI: https://doi.org/10.1524/teme.2009.0964

2009-05-01

Abstract:Abstract A new co-planar stage has been designed based on the Abbé principle, symmetrical structure, and Bryan principle. It is used for the long-stroke and nanopositioning to be equipped as the X-Y stage to a developed Micro-CMM. Other than the common motor-ballscrew or linear motor driven type, this co-planar stage is moved by the friction force of an ultrasonic motor with the push-pull mode in each axis. This push-pull mechanism follows the Abbé principle that the measuring axis is in line with the moving axis. The developed new nanoscales can provide the displacement readings to 1 nm resolution after signal interpolation. The measuring length is about 20 mm. After careful assembly, the straightness and the flatness of the table can be achieved to submicron order.
A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle

Junhui Zhu,Siyuan Meng,Yong Wang,Ming Pang,Zhiping Hu,Changhai Ru

DOI: https://doi.org/10.3390/mi13112008

2022-11-18

Abstract:The precise characterization and measurement of new nanomaterials and nano devices require in situ SEM nanorobotic instrumentation systems, which put forward further technical requirements on nanopositioning techniques of compact structure, cross-scale, nanometer accuracy, high vacuum and non-magnetic environment compatibility, etc. In this work, a novel cross-scale nanopositioning stage was proposed, which combined the advantages of piezoelectric stick-slip positioner and piezoelectric scanner techniques and adopted the idea of macro/micro positioning. A new structure design of a single flexible hinge shared by a small and large PZT was proposed to effectively reduce the size of the positioning stage and achieve millimeter stroke and nanometer motion positioning accuracy. Then, the cross-scale motion generation mechanism of the dual piezoelectric stick-slip drive was studied, the system-level dynamics model of the proposed positioning stages was constructed, and the mechanism design was optimized. Further, a prototype was manufactured and a series of experiments were carried out to test the performance of the stage. The results show that the proposed positioning stage has a maximum motion range of 20 mm and minimum step length of 70 nm under the small piezoceramic ceramic macro-motion stepping mode, and a maximum scanning range of 4.9 μm and motion resolution of 16 nm under the large piezoceramic ceramic micro-motion scanning mode. Moreover, the proposed stage has a compact structure size of 30 × 17 × 8 mm3, with a maximum motion speed of 10 mm/s and maximum load of 2 kg. The experimental results confirm the feasibility of the proposed stage, and nanometer positioning resolution, high accuracy, high speed, and a large travel range were achieved, which demonstrates that the proposed stage has significant performance and potential for many in situ SEM nanorobotic instrument systems.
Development of a Parallel-Kinematic High-Speed XY Nanopositioning Stage

Chun-Xia Li,Guo-Ying Gu,Mei-Ju Yang,Li-Min Zhu

DOI: https://doi.org/10.1007/978-3-642-40849-6_67

2013-01-01

Abstract:This paper presents a parallel-kinematic high-speed XY nano-positioning stage driven by piezoelectric stack actuators. With the purpose to achieve high resonance frequencies and a relatively large travel range, four special flexure modules are used to provide large stiffness. A symmetric configuration is adopted for the designed stage to reduce the cross-coupling between two axes and restrict parasitic motions as well. Static and dynamic analysis of the stage is performed respectively, and the dimensional optimization is carried out on the basis of static and dynamic models to maximize the first resonance frequency of the stage. Finite-element analysis (FEA) is utilized to confirm the effectiveness of the design. The FEA results show that the stage has good static and dynamic performances, which are well validated by the experiments. According to the experimental results, the stage is capable of a workspace of 11.2μm ×11.6μm with positioning resolution of 3 nm. Besides, the resonance frequencies of the stage are over 13.6 kHz with the cross-coupling between two axes lower than -44 dB. It is clearly demonstrated that the stage has high resonance frequencies, relatively large travel range and nearly decoupled performance in two axes.
A Novel Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Actuation with a Shared Flexible Hinge

Siyuan Meng,Junhui Zhu,Yong Wang,Luoning Shi,Jia Yu,Dongmei Wu,Wei Dong,Changhai Ru

DOI: https://doi.org/10.1109/marss61851.2024.10612733

2024-01-01

Abstract:This paper presents a novel cross-scale nanopositioning stage that integrates the advantages of piezoelectric stick-slip positioners and piezoelectric scanners, utilizing the concept of macro-micro positioning. Initially, a unique structural design featuring a single flexible hinge shared by a small and a large PZT is proposed to reduce the stage's size effectively, enabling millimeter-scale strokes with nanometer-scale positioning accuracy. Subsequently, the cross-scale motion generation mechanism of the dual piezoelectric stick-slip drive is investigated, leading to the development of a system-level dynamics model for the proposed positioning stages. The mechanism design is further optimized to enhance performance. A prototype is manufactured, and a series of experiments are conducted to evaluate the stage's performance. Results indicate that the proposed positioning stage achieves a maximum motion range of 20 mm and a minimum step length of 70 nm in small piezoceramic macro-motion stepping mode, along with a maximum scanning range of 4.9 mu m and a motion resolution of 16 nm in large piezoceramic micro-motion scanning mode. Moreover, the compact structure of the stage (30x17x8 mm(3)) supports a maximum motion speed of 10 mm/s and a maximum load of 2 kg. Experimental validation confirms the feasibility of the proposed stage, demonstrating nanometer positioning resolution, high accuracy, high speed, and large travel range. These attributes highlight the significant potential of the proposed stage in various in-situ SEM nanorobotic instrument systems.
Nanoscale Lamb Wave–driven Motors in Nonliquid Environments

Jinsheng Lu,Qiang Li,Cheng-Wei Qiu,Yu Hong,Pintu Ghosh,Min Qiu

DOI: https://doi.org/10.1126/sciadv.aau8271

IF: 13.6

2019-01-01

Science Advances

Abstract:Achieving light-driven motions in nonliquid environments presents formidable challenges, because microsized objects experience strong dry adhesion and intend to be stuck to contact surfaces with great tenacity. Here, in air and vacuum, we show rotary locomotion of a micrometer-sized metal plate with ~30 nm thickness, revolving around a microfiber. This motor is powered by pulsed light guided into the fiber as a coordinated consequence of an optically excited Lamb wave on the plate and favorable configuration of plate-fiber geometry. The motor, actuated by designed light pulses, crawls stepwise with subnanometer locomotion resolution. Furthermore, we can control the rotation velocity and step resolution by varying the repetition rate and pulse power, respectively. A light-actuated micromirror scanning with 0.001° resolution is then demonstrated on the basis of this motor. It offers unprecedented application potential for integrated micro-opto-electromechanical systems, outer-space all-optical precision mechanics and controls, and laser scanning for miniature lidar systems.
Design and Testing of One-Dimensional Nano-Positioning Stage with Large Travel Range and High Resolution

RONG Wei-bin,WU Zhen-guang,SUN Li-ning

2012-01-01

Abstract:Design and performance testing of a one-dimensional nano-positioning stage with large travel range and high resolution are presented.Driven by dual piezoeletric actuators,the stage is developed based on differential leverage and flexible hinge.Flexible hinge stiffness,input reaction force,and amplification ratio are firstly analyzed based on material mechanics and structural vibration.The finite element analysis is used for validating amplification ratio and admissible stress.Finally,the experimental setup is developed and the performance of the stage is tested.The results show that the stage has a travel range of over 240 μm and a resolution of about 10 nm with the outsize of 80 mm×60 mm×20 mm.The proposed stage based on differential leverage can be used for large travel-range nano-positioning with high resolution.
Analysis and Design for the Nano-positioning XY-Stage Based on the MEMS Technology

Lining Sun,JiaChou Wang,Weibin Rong,LiGuo Chen

DOI: https://doi.org/10.1109/ICMA.2007.4303769

2007-01-01

Abstract:In order to realize nano-positioning for operating on the micro-object under the nano-scale condition, the paper presented a novel single crystal silicon (SCS) nano-positioning micro XY-Stage, which bases on the technology of Micro Electro Mechanical Systems (MEMS) and integrates with the functions of drive and detecting position. This XY-Stage is fabricated on a single-crystal-silicon by combining the technology of the deep reactive ion etching (DRIE) at silicon with anode bonding processes. Lateral electrostatics comb drive is used as driving power to drive the movable stage in the x-direction and y-direction and the displacement of the movable stage is detected by the position sensors. Then the signals derived from the sensors are used to build up the closed-loop control to improve the XY-Stage positioning precision. Especially, each comb-drive actuator adopts pull-pull mode to increase the electrostatic force. The developed XY-Stage of 2000times2000 mum2 is suspended in the center of the chip by four sets of folded beam, detecting beam and bending flexure composite springs. The paper modeled the structure and used finite element method (FEM) to analyze the structure of the XY-Stage, maximize moving distance, resonant frequency and modal shape of the XY-Stage. The simulation and analysis result showed that under 30 V driving voltage, the efficient driving force is 649.8 muN and a 13.5 mum moving stroke in each of four directions. Simultaneity, the mechanical coupling is very small (0.0114 mum); and the first-order resonant frequency is 1121 Hz, above of all verified the XY-Stage is reasonable and practical further.
A Piezo-Driven Compliant Nanopositioning Stage with Large Stroke for Micro/Nano Manipulation

Xiaobo Zhu,Zhijie Wen,Pinkuan Liu

DOI: https://doi.org/10.1051/matecconf/20167701040

2016-01-01

MATEC Web of Conferences

Abstract:This paper presents the design, analysis, and testing of a single-axis compliant nanopositioning stage with large stroke driven by piezoelectric actuator for micro/nano manipulation. In the developed stage, a hybrid displacement amplifier integrating two kinds of flexure-based input/output decoupling modules have been developed to achieve a large stroke and precise positioning. The analytical modelling and finite element analysis are given to validate the mechanical performance and a prototype of the proposed stage is fabricated for performance tests. The experimental results show that the developed stage has the travel stroke of 214 μm with a resolution of 8 nm. It is demonstrated that the stage can be adequate for micro/nano manipulation.
A Silicon Integrated Micro Nano-Positioning Xy-Stage for Nano-Manipulation

Lining Sun,Jiachou Wang,Weibin Rong,Xinxin Li,Haifei Bao

DOI: https://doi.org/10.1088/0960-1317/18/12/125004

2008-01-01

Journal of Micromechanics and Microengineering

Abstract:An integrated micro XY-stage with a 2 x 2 mm(2) movable table is designed and fabricated for application in nanometer-scale operation and nanometric positioning precision. The device integrates the functions of both actuating and sensing in a monolithic chip and is mainly composed of a silicon-based XY-stage, comb-drive actuator and a displacement sensor, which are developed by using double-sided bulk-micromachining technology. The high-aspect-ratio comb-driven XY-stage is achieved by deep reactive ion etching (DRIE) on both sides of the wafer. The displacement sensor is formed on four vertical sidewall surface piezoresistors with a full Wheatstone bridge circuit, where a novel fabrication process of a vertical sidewall surface piezoresistor is proposed. Comprehensive design and analysis of the comb actuator, the piezoresistive displacement sensor and the XY-stage are given in full detail, and the experimental results verify the design and fabrication of the device. The final realization of the device shows that the sensitivity of the fabricated piezoresistive sensors is better than 1.17 mV mu m(-1) without amplification, and the linearity is better than 0.814%. Under 28.5 V driving voltage, a +/- 10 mu m single-axis displacement is measured without crosstalk and the resonant frequency is measured at 983 Hz in air.
A Novel Inertial Micro-Actuator and Its Application in Positioning Mechanism

LIU Chao,ZHANG Hai-jun,ZHANG Dong-xian

DOI: https://doi.org/10.3969/j.issn.1005-5630.2005.06.007

2005-01-01

Abstract:A new inertial micro-actuator based on piezo element directly driven by electronic circuits is developed.This article introduces the principle and setup of the actuator in detail.Some experiments are carried out to measure the micro displacement and dynamic property of the actuator.The experiments show that the actuator is capable of generating a smooth movement under the voltages of 20V~350V and 20Hz~125Hz.The average step ranges from 60nm~1502nm,and the maximum speed reaches to 120μm/s with infinite moving range.The application of the micro-actuator in scanning tunneling microscope for tip approaching is also discussed.
Development of a large-stroke piezo-actuated stage for nanopositioning

Junbin Zhang,Peisen S. Huang

2013-01-01

Abstract:null
Design and Experiment of Vertical Motion Dual-stage with Piezo-actuated Nanopositioning Stage

任佳琦,朱晓博,陈国真,刘品宽

DOI: https://doi.org/10.16356/j.1005-1120.2015.02.199

2018-01-01

Abstract:Nanopositioning stage based on piezoelectric（PZT）actuators and flexure mechanisms has been widely used in dual-stage.Its favorable positioning accuracy and dynamic response can guarantee the high performance of the dual-stage.Here the vertical axis motion dual-stage is designed with piezoelectric actuator for the fine-stage and ball-screw drive integrated with wedge sliding mechanisms for the coarse-stage.The aim of the dual-stage is to meet the stringent requirement of scanning over a relative large range with high accuracy.The design results of the piezo-actuated nanopositioning stage show good static and dynamic performance,validated by the simulation of finite element analysis（FEA）.Hysteresis nonlinearity due to the use of piezoelectric stacks for actuation is studied and compensated by aproportional-integral（PI）feedback controller.To qualify the design of the motion ranges and resolutions,an experiment platform is established.The experimental results show that the proposed dual-stage has a full range of 12 mm with the resolution of 40 nm.Guideline is provided for the design methodology of the vertical motion dual-range stages.

Development of Micromotion Stage with Nanoscale Resolution

A piezodriven three dimensional micropositioning stage for nano-manufacturing

Design and Verification of an XYZ Three-axis Micro Stage

Design And Analysis Of Two Dimensional X-Y Micropositioning Stage

Six-DOF maglev nano precision microstage development

A Novel Piezoelectrically Actuated 2-Dof Compliant Micro/Nano-Positioning Stage with Multi-Level Amplification

Design Research of a Novel High Speed Nanometer Positioning System on Macro/Micro Driven for MEMS

Development of a compact and long range XYθ(z) nano-positioning stage.

Investigation on A Novel Dual-Grating Macro-Micro Driven High Speed Precision Positioning System for Nems

Design of a Novel Low-Cost and Long-Stroke Co-Planar Stage for NanopositioningNeuartiger preisgünstiger Zwei-Ebenen-Positioniertisch für die Nanopositionierung

A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle

Development of a Parallel-Kinematic High-Speed XY Nanopositioning Stage

A Novel Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Actuation with a Shared Flexible Hinge

Nanoscale Lamb Wave–driven Motors in Nonliquid Environments

Design and Testing of One-Dimensional Nano-Positioning Stage with Large Travel Range and High Resolution

Analysis and Design for the Nano-positioning XY-Stage Based on the MEMS Technology

A Piezo-Driven Compliant Nanopositioning Stage with Large Stroke for Micro/Nano Manipulation

A Silicon Integrated Micro Nano-Positioning Xy-Stage for Nano-Manipulation

A Novel Inertial Micro-Actuator and Its Application in Positioning Mechanism

Development of a large-stroke piezo-actuated stage for nanopositioning

Design and Experiment of Vertical Motion Dual-stage with Piezo-actuated Nanopositioning Stage