Development of a large-stroke piezo-actuated stage for nanopositioning

Junbin Zhang,Peisen S. Huang

2013-01-01

Abstract:null

What problem does this paper attempt to address?

A piezodriven three dimensional micropositioning stage for nano-manufacturing

Wen Wang,Robert J. Hocken,Zhu Zhu,Zichen Chen

2010-01-01

Abstract:Multiple dimensional micropositioning stages are key components in many fields including nanomanufacturing, precision instruments, biological manipulation, medical imaging and etc., in which the stages are usually demanded to provide up to hundreds of microns range and nearly nanometer scale resolution at multiple axial directions simultaneously. Meanwhile the devices' size are also restricted because of limited space. In this paper a three dimensional micropositioning stage with flexure hinges supporting and piezo actuators driving to generate displacements is presented. The structure of the stage is introduced and the working principle of stage is described. Analysis has been done via Finite Element Analysis (FEA) and parameters of the flexure hinges were selected. The computational results show that the stage has resonant frequencies of hundreds of Hertz with an over 500 grams working load, and the travlling range can reach up to hundreds of microns in X and Y directions. A prototype was fabricated and a primary test has been doing to verify the feasibility of design.
A Novel Piezoelectrically Actuated 2-Dof Compliant Micro/Nano-Positioning Stage with Multi-Level Amplification

Wu-Le Zhu,Zhiwei Zhu,Yi Shi,Xiangfan Chen,Yu He,Kornel F. Ehmann,Bing-Feng Ju

DOI: https://doi.org/10.1063/1.4965880

IF: 1.6

2016-01-01

Review of Scientific Instruments

Abstract:This article presents a novel two-degrees-of-freedom (2-DoF) piezo-actuated parallel-kinematic micro/nano-positioning stage with multi-level amplification. The mirror symmetric stage consists of four leverage mechanisms, two Scott-Russell mechanisms, and a Z-shaped flexure hinge (ZFH) mechanism. Taking advantage of the ZFH mechanism, 2-DoF motions with final-level flexural amplification and decoupled motion guidance are achieved. Analytical models of the stage are developed and validated through finite element analysis to characterize its working performance. Practical testing of a prototype stage is conducted to demonstrate the design process and to quantify its response characteristics. Due to the utilized multi-level amplification, a practical amplification ratio of 13.0 is realized by the prototype. The decoupled output motion guidance feature of the stage makes it amenable for implementation in raster scanning type of measurements.
Design And Analysis Of Two Dimensional X-Y Micropositioning Stage

Wang Wen,Zhu Zhu,Chen Zichen

DOI: https://doi.org/10.1117/12.885293

2010-01-01

Abstract:This paper presents a novel piezodriven X-Y stage utilizing flexure hinges. Levers of high amplifying rate were adopted to magnify the output displacement of the piezoelectric actuator and a complex parallel four-bar mechanism was used to guide the mobile platform. In order to describe the static and dynamic behaviour of the stage, an analytical model was built and a series of formulae were deduced. Based on mathematical analysis, the configuration of the stage was optimized. Then Finite Element Analysis was applied to analyze travel ranges, natural frequencies and stress distribution. The simulation computation results demonstrate that the stage could reach a motion range of 200 mu m by 200 mu m and has a first order natural frequency of 265 Hertz, which is of good concordance with the theoretical estimate. Now a prototype is being fabricated.
A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle

Junhui Zhu,Siyuan Meng,Yong Wang,Ming Pang,Zhiping Hu,Changhai Ru

DOI: https://doi.org/10.3390/mi13112008

2022-11-18

Abstract:The precise characterization and measurement of new nanomaterials and nano devices require in situ SEM nanorobotic instrumentation systems, which put forward further technical requirements on nanopositioning techniques of compact structure, cross-scale, nanometer accuracy, high vacuum and non-magnetic environment compatibility, etc. In this work, a novel cross-scale nanopositioning stage was proposed, which combined the advantages of piezoelectric stick-slip positioner and piezoelectric scanner techniques and adopted the idea of macro/micro positioning. A new structure design of a single flexible hinge shared by a small and large PZT was proposed to effectively reduce the size of the positioning stage and achieve millimeter stroke and nanometer motion positioning accuracy. Then, the cross-scale motion generation mechanism of the dual piezoelectric stick-slip drive was studied, the system-level dynamics model of the proposed positioning stages was constructed, and the mechanism design was optimized. Further, a prototype was manufactured and a series of experiments were carried out to test the performance of the stage. The results show that the proposed positioning stage has a maximum motion range of 20 mm and minimum step length of 70 nm under the small piezoceramic ceramic macro-motion stepping mode, and a maximum scanning range of 4.9 μm and motion resolution of 16 nm under the large piezoceramic ceramic micro-motion scanning mode. Moreover, the proposed stage has a compact structure size of 30 × 17 × 8 mm3, with a maximum motion speed of 10 mm/s and maximum load of 2 kg. The experimental results confirm the feasibility of the proposed stage, and nanometer positioning resolution, high accuracy, high speed, and a large travel range were achieved, which demonstrates that the proposed stage has significant performance and potential for many in situ SEM nanorobotic instrument systems.
Development of a compact and long range XYθ(z) nano-positioning stage.

D. Gweon,Hyunchang Kim

DOI: https://doi.org/10.1063/1.4740254

IF: 1.6

2012-08-08

Review of Scientific Instruments

Abstract:In this study, we describe the development of a novel, compact, and long range in-plane XYθ(z) nano-positioning stage with piezoelectric actuator and flexure mechanism. The stage is composed of an X-directional motion part and a Y, θ(z)-directional motion part, which are linked serially. The stage consists of a bridge-type amplifying mechanism for the amplification of deformation of the piezoelectric actuator, a double compound guide mechanism for performing only desired motion, and a circular hinge mechanism that permits rotational motion in the Y and θ(z)-stages. To set the design variables of the stage, optimal design is carried out. To verify the results of the optimal design process and the performance of the stage, the FEM simulation and experiment are carried out. The proposed XYθ(z) nano-positioning stage has a translational motion range of 700 μm and a rotational motion range of 0.3°; it has a closed-loop resolution of 5 nm, 5 nm, and 0.025 arcsec in the X-, Y-, and θ(z)-directional motions, respectively. The proposed stage is a novelty in that it has a compact size of 200 × 200 × 30 mm(3), and decoupled kinematic design.

Physics,Engineering,Medicine,Materials Science
A Novel Hybrid Actuation Mechanism Based XY Nanopositioning Stage with Totally Decoupled Kinematics

Wu-Le Zhu,Zhiwei Zhu,Ping Guo,Bing-Feng Ju

DOI: https://doi.org/10.1016/j.ymssp.2017.07.010

IF: 8.4

2018-01-01

Mechanical Systems and Signal Processing

Abstract:This paper reports the design, analysis and testing of a parallel two degree-of-freedom piezo-actuated compliant stage for XY nanopositioning by introducing an innovative hybrid actuation mechanism. It mainly features the combination of two Scott-Russell and a half-bridge mechanisms for double-stage displacement amplification as well as moving direction modulation. By adopting the leaf-type double parallelogram (LTDP) structures at both input and output ends of the hybrid mechanism, the lateral stiffness and dynamic characteristics are significantly improved while the parasitic motions are greatly eliminated. The XY nanopositioning stage is constructed with two orthogonally configured hybrid mechanisms along with the LTDP mechanisms for totally decoupled kinematics at both input and output ends. An analytical model was established to describe the complete elastic deformation behavior of the stage, with further verification through the finite element simulation. Finally, experiments were implemented to comprehensively evaluate both the static and dynamic performances of the proposed stage. Closed-loop control of the piezoelectric actuators (PEA) by integrating strain gauges was also conducted to effectively eliminate the nonlinear hysteresis of the stage. (C) 2017 Elsevier Ltd. All rights reserved.
Design, modeling, analysis and testing of a novel piezo-actuated XY compliant mechanism for large workspace nano-positioning

Wu-Le Zhu,Zhiwei Zhu,Yi Shi,Xinwei Wang,Kaimin Guan,Bing-Feng Ju

DOI: https://doi.org/10.1088/0964-1726/25/11/115033

IF: 4.1

2016-01-01

Smart Materials and Structures

Abstract:In this paper, a new piezo-actuated XY parallel compliant mechanism for large workspace nano-positioning with decoupled motions is developed by incorporating a novel Z-shaped flexure hinge (ZFH)-based mechanism into the mirror-symmetrically distributed structure. The bridgetype mechanism and two-stage leverage mechanisms serve as preliminary displacement amplifiers, while further amplification with motion transfer and decoupled output motions are achieved by means of the ZFH mechanism. Based on finite element theory, a high-precision analytical model of the XY compliant mechanism is established by considering all the connecting linkages as flexible components. Through the improved differential evolution algorithm, the optimized compliant mechanism is capable of performing millimeter-scale workspace nano-positioning with decoupled motions. In addition, the input displacement unbalance, resulting from the lateral force which has potential to damage the piezoelectric actuators, is markedly lowered to a negligible value. The performance of the fabricated compliant mechanism with optimized parameters is investigated to well agree with both the analytical model and ANSYS simulation. In addition, based on the inverse kinematics derived from the model and experimental results, different elliptical vibration trajectories are accurately acquired.
Redundantly Piezo-Actuated XYθ Z Compliant Mechanism for Nano-Positioning Featuring Simple Kinematics, Bi-Directional Motion and Enlarged Workspace

Wu-Le Zhu,Zhiwei Zhu,Suet To,Qiang Liu,Bing-Feng Ju,Xiaoqin Zhou

DOI: https://doi.org/10.1088/0964-1726/25/12/125002

IF: 4.1

2016-01-01

Smart Materials and Structures

Abstract:This paper presents a novel redundantly piezo-actuated three-degree-of-freedom XY theta(z) compliant mechanism for nano-positioning, driven by four mirror-symmetrically configured piezoelectric actuators (PEAs). By means of differential motion principle, linearized kinematics and physically bi-directional motions in all the three directions are achieved. Meanwhile, the decoupled delivering of three-directional independent motions at the output end is accessible, and the essential parallel and mirror symmetric configuration guarantees large output stiffness, high natural frequencies, high accuracy as well as high structural compactness of the mechanism. Accurate kinematics analysis with consideration of input coupling indicates that the proposed redundantly actuated compliant mechanism can generate three-dimensional (3D) symmetric polyhedral workspace envelope with enlarged reachable workspace, as compared with the most common parallel XY theta(z) mechanism driven by three PEAs. Keeping a high consistence with both analytical and numerical models, the experimental results show the working ranges of +/- 6.21 mu m and +/- 12.41 mu m in X-and Y-directions, and that of +/- 873.2 mu rad in theta(z)-direction with nano-positioning capability can be realized. The superior performances and easily achievable structure well facilitate practical applications of the proposed XY theta(z) compliant mechanism in nano-positioning systems.
Modeling and Control of a Novel X-Y Parallel Piezoelectric-Actuator Driven Nanopositioner

Pengbo Liu,Peng Yan,Zhen Zhang,Tongtong Leng

DOI: https://doi.org/10.1016/j.isatra.2014.10.005

IF: 7.3

2015-01-01

ISA Transactions

Abstract:In this paper, a novel X–Y parallel piezoelectric-actuator driven nanopositioner is studied from the perspectives of design optimization, dynamical modeling, as well as controller synthesis for high precision positioning. FEM (Finite Element Method) and dynamical modeling are provided to analyze the mechatronic structure of the proposed two-dimensional nano-stage, where the system model, including the hysteresis loop, is derived analytically and further verified experimentally. A robust control architecture incorporating an H∞ controller and an anti-windup compensator is then developed to deal with the hysteresis and saturation nonlinearities of the piezoelectric actuators. Real time experiments on the nano-stage platform demonstrate good robustness, high precision positioning and tracking performance, as well as recovery speed in the presence of saturation.
Design of a Novel Low-Cost and Long-Stroke Co-Planar Stage for NanopositioningNeuartiger preisgünstiger Zwei-Ebenen-Positioniertisch für die Nanopositionierung

Kuang-Chao Fan,Zhi-Yua Ke,Bai-Kun Li

DOI: https://doi.org/10.1524/teme.2009.0964

2009-05-01

Abstract:Abstract A new co-planar stage has been designed based on the Abbé principle, symmetrical structure, and Bryan principle. It is used for the long-stroke and nanopositioning to be equipped as the X-Y stage to a developed Micro-CMM. Other than the common motor-ballscrew or linear motor driven type, this co-planar stage is moved by the friction force of an ultrasonic motor with the push-pull mode in each axis. This push-pull mechanism follows the Abbé principle that the measuring axis is in line with the moving axis. The developed new nanoscales can provide the displacement readings to 1 nm resolution after signal interpolation. The measuring length is about 20 mm. After careful assembly, the straightness and the flatness of the table can be achieved to submicron order.
A piezo-actuated nanopositioning stage based on spatial parasitic motion principle

Xiaolu Zhao,Fujun Wang,Beichao Shi,Yanling Tian,Dawei Zhang

DOI: https://doi.org/10.1016/j.sna.2024.115124

2024-04-01

Abstract:This paper presents the configuration, design, and characteristic analysis of a novel two-degree-of-freedom stick-slip nanopositioning stage based on the spatial parasitic motion principle. The planar-spatial evolution process is proposed to develop a compliant tripod mechanism by which the spatial parasitic motion can be generated for dual-axis actuation. An X-shaped hinge configuration is designed by freedom and constraint space analysis and introduced to the mechanism to improve the loading capacity of the nanopositioning stage. The actuation principle for driving along X- and Y-directions forward and backward is provided. The chain-based compliance matrix method is adopted for kinematic and static modeling of the compliant tripod mechanism. The dominant parameters are determined based on sensitivity analysis, and the performance of the stage is further studied by finite element method. The nanopositioning stage prototype is fabricated and assembled, and experimental investigations are conducted. The proposed nanopositioning stage has maximum velocities of 0.77 mm/s and 1.03 mm/s along X- and Y-direction, and a loading capacity of 5 kg can be achieved. Furthermore, the coarse-fine positioning experiments are carried out, and the positioning resolution is measured to be 18 nm.

engineering, electrical & electronic,instruments & instrumentation
Design and Experimental Study of a Stepping Piezoelectric Actuator with Large Stroke and High Speed

Qirui Duan,Yajun Zheng,Jun Jin,Ningdong Hu,Zenglei Zhang,Hongping Hu

DOI: https://doi.org/10.3390/mi14020267

IF: 3.4

2023-01-21

Micromachines

Abstract:A stepping piezoelectric actuator is proposed with large stroke and high speed. The piezoelectric actuator consists of two symmetrical stators and a mover. The actuator can operate with a "double-drive, four-clamp" mode. The proposed actuator solves the problems of short stroke, low speed, and small load inherent in the currently published stepping piezoelectric actuators. By combining Workbench software with APDL language, finite element simulation and statics and dynamics analysis are carried out to guide the design of the actuator. The new piezoelectric simulation method can solve the difficulties regarding parameter setting and loading voltage on multiple interfaces for a complex piezoelectric model. Therefore, the novel method is helpful to develop the simulation of multilayer thin piezoelectric devices. The prototype of the actuator is developed and tested. Experimental results show that the actuator can run stably in the range of 0 to 600 Hz. The driving stroke is greater than 85 mm, the resolution can reach 535 nm, the maximum driving speed is 6.11 mm/s, and the maximum load is 49 N.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
A Multi-Mode Self-Centering Piezo Actuator: Design, Analysis and Its Application in Full-Stroke Microscopic Imaging

Guangda Qiao,Ziyue Zhang,Guofang Gong,Huayong Yang,Dong Han

DOI: https://doi.org/10.1016/j.ymssp.2024.111963

IF: 8.4

2025-01-01

Mechanical Systems and Signal Processing

Abstract:Parasitic piezo dive is a primary method for cross-scale positioning, which can adjust the locking force appropriately to increase the service life but bring radial fluctuations, backward motion, and bi-directional inconsistency issues. In this work, a multi-mode self-centering piezo actuator is proposed, a theoretical analysis model of the transmission mechanism is established, and parameterized design is conducted using the finite element method. The actuator features normal pressure adjustment, parallel drive, parasitic drive, and rectangular drive modes. Under the first mode, a bias voltage of 50 Vp-p achieved a locking force adjustment of 2.5 N. Furthermore, the characteristics of the remaining modes were compared. It was observed that the parallel trajectory drive mode exhibited a higher velocity of 31.68 mm/s, while the rectangular trajectory drive mode suppressed the backward motion to achieve smooth driving, with a linear correlation coefficient R-2 of the displacement reaching 0.9999. Compared to the traditional parasitic actuator, the radial fluctuations in these two drive modes were reduced by up to 98.4 %, and the bidirectional consistency were improved to 97 %. Finally, we completed convenient imaging of various specimens across the full-stroke of microscopes by integrated circuit design and Bluetooth communication on mobile phones.
A 3-DOF piezoelectric driven nanopositioner: Design, control and experiment

Peng-Zhi Li,De-Fu Zhang,Barry Lennox,Farshad Arvin

DOI: https://doi.org/10.1016/j.ymssp.2020.107603

IF: 8.4

2021-06-01

Mechanical Systems and Signal Processing

Abstract:In this paper, a novel 3-degree-of-freedom (DOF) nanopositioner was investigated in order to position objects with nanometer scale accuracy. Nanopositioners are used in a variety of real-world applications, e.g. biomedical technology and nanoassembly. In this work, a nanopositioner was firstly designed with the flexure diaphragm guider, capacitive sensors and walking piezoelectric actuators. The specifically designed monolithic flexure diaphragm guider was able to significantly restrict motions in the other unwanted directions. The walking piezoelectric actuator can enable the developed nanopositioner to have nanometer scale positioning accuracy and a large travel range. Then a closed-loop sliding mode control strategy was developed to overcome the effect of the actuator's speed nonlinearity and its stability was analysed based on Lyapunov theory. Finally, experiments focused on coupling displacement and point-to-point movement were conducted. The observed results revealed that the ratio of coupling displacement to Z displacement was less than 0.1%, which means that the coupling displacement was less than 120 nm during the Z direction travel range of the nanopositioner from −80 <math>μ</math>m to 80 <math>μ</math>m. Moreover, the positioning accuracy in the Z direction of point-to-point movement was within 10 nm and the dynamic response settled within 0.2 s. Therefore, the experimental results showed that the novel piezoelectric driven nanopositioner has excellent performance in terms of coupling displacement and nanometer scale accuracy for point-to-point movement.

engineering, mechanical
A Novel Inertial Micro-Actuator and Its Application in Positioning Mechanism

LIU Chao,ZHANG Hai-jun,ZHANG Dong-xian

DOI: https://doi.org/10.3969/j.issn.1005-5630.2005.06.007

2005-01-01

Abstract:A new inertial micro-actuator based on piezo element directly driven by electronic circuits is developed.This article introduces the principle and setup of the actuator in detail.Some experiments are carried out to measure the micro displacement and dynamic property of the actuator.The experiments show that the actuator is capable of generating a smooth movement under the voltages of 20V~350V and 20Hz~125Hz.The average step ranges from 60nm~1502nm,and the maximum speed reaches to 120μm/s with infinite moving range.The application of the micro-actuator in scanning tunneling microscope for tip approaching is also discussed.
Design and Analysis of an X–Y Parallel Nanopositioner Supporting Large-Stroke Servomechanism

Pengbo Liu,Peng Yan,Zhen Zhang

DOI: https://doi.org/10.1177/0954406214533103

2014-01-01

Abstract:In this paper, we consider the design and analysis of an X–Y parallel piezoelectric-actuator-driven nanopositioner with a novel two-stage amplifying mechanism, where the mechanical design is optimized to achieve a large stroke and high-natural frequency for the purpose of high-performance servomechanism. The parallel kinematic X–Y flexure mechanism provides good geometric decoupling. The kinematic and dynamic analysis shows that the proposed design has a large work space and high bandwidth, which is further verified by finite-element analysis. The analysis results demonstrate that the designed nanopositioner has a large workspace more than 200 µm and a high-natural frequency at about 760 Hz. Furthermore, the dynamical model of the nanopositioner, including the dynamics of the PZT actuators, is also generated from the perspective of input/output transfer functions, and the parameters are identified by frequency-response experiments, which can be used for nano precision servomechanism.
A Gravity-Assisted Piezoelectric Inertial Actuator for Bidirectional Smooth Drives by Single Excitation Source

Guangda Qiao,Fang Lu,Guofang Gong,Huayong Yang,Dong Han

DOI: https://doi.org/10.1109/tie.2023.3292876

IF: 7.7

2024-01-01

IEEE Transactions on Industrial Electronics

Abstract:The piezoelectric inertial actuator is one of the critical technologies for precision equipment. However, its inherent working mode makes it difficult to achieve smooth motion, further limiting broad commercialization. This work presents a gravity-assisted piezoelectric inertial actuator that can achieve bidirectional smooth drives by a single excitation source and improve bidirectional consistency in vertical assembly by actively leveraging the contact behaviors of the piezoelectric stack and flexure mechanism. Specifically, the strategy is to balance the forward displacement surge and the reverse backward motion using assisted gravity combined with the locking force regulation of the stator's parasitic motion. The operating process is clarified by kinetic modeling, the parametric design of the structure is completed by the finite element method, and experimental studies verify the concept's feasibility. Bidirectional displacement linear fitting correlation coefficients R-2 reach 0.9999 assisted by gravity, even at the dead weight of a moving object equivalent to a load thrust of 1.35 N (more than 3.3 times the current work). The maximum velocity and resolution achieve 304.73 mm/s and 5.3 nm, respectively. This novel design idea is especially suitable for the Z degree-of-freedom drive, which has been successfully applied to microscopic imaging.
Design, modeling, and analysis of a new XYθ piezoelectric microstage featuring high amplification ratios and multiple actuation modes

Gaohua Wu,Guoping Li,Yiling Yang,Yanding Wei

DOI: https://doi.org/10.1007/s00542-024-05670-7

2024-04-28

Microsystem Technologies

Abstract:This paper presents the design, modeling, and analysis of a new XYθ piezoelectric microstage with high amplification ratios and fully symmetrical structures. Through the reconfigurable assembly positions of piezoelectric actuators, the proposed microstage can provide multiple actuation modes and low translational parasitic motion. The microstage is devised using improved four-bar amplification mechanisms and parallelogram guiding mechanisms. Based on the matrix-based compliance modeling, static and dynamic models are obtained. The theoretical models are analyzed by finite element analysis (FEA). Finally, a prototype of the proposed microstage is manufactured, an experimental system is set up, and the performance of the microstage is tested. The experimental results show that the microstage has amplification ratios of 8.40 ( x -axis) and 8.52 ( y -axis). The displacement coupling ratios in the x - and y -axis directions are 0.83% and 0.94%, respectively. Moreover, the maximum rotation angle is ± 2379.18 μrad when the microstage uses the actuation mode of the pure center rotation. The XYθ microstage is capable of multiscale micromanipulation.

engineering, electrical & electronic,materials science, multidisciplinary,nanoscience & nanotechnology,physics, applied
Design of A Long Stroke Nanopositioning Stage with Self-damping Actuator and Flexure Guide

Chi Zhang,Xiaolu Huang,Miao Yang,Silu Chen,Guilin Yang,Si-Lu Chen

DOI: https://doi.org/10.1109/tie.2021.3126981

IF: 7.7

2021-01-01

IEEE Transactions on Industrial Electronics

Abstract:Long stroke nanopositioning stages with high natural frequency and compact size are demanded in precision engineering. However, in previous researches, the natural frequency of the long stroke nanopositioning stage is normally below 50 Hz because the actuated force, moving mass, stiffness, motion range, and damping ratio are not considered simultaneously and optimized thereafter. To solve this problem, a long stroke nanopositioning stage driven by the self-damping moving magnet actuator (SMMA) and supported by the flexure guide is integrated and designed in this article. The SMMA consists of two identical tooth-slot structure stators and one moving magnet which is embedded inside the flexure guide. Copper plates that functioned as eddy-current dampers are attached on the tooth surfaces to suppress the resonance peak at the natural frequency. An integrated dynamics model that consists of force, damping coefficient, and stiffness is established. The dimensional parameters of the proposed positioning stage are optimized to improve the system performances based on the developed model. Experimental results show that the natural frequency of the positioning stage reaches up to 71 Hz. The stage can achieve 20 nm positioning resolution within a motion range of $\pm$5 mm, and the root mean square tracking errors for 1 Hz sinusoidal and triangular commands are below 0.1 of the trajectory amplitudes.

automation & control systems,engineering, electrical & electronic,instruments & instrumentation
Design of a linear-rotary micro-stage

yuxin peng,yasumasa sakurai,yoshikazu arai,yuki shimizu,wei gao

DOI: https://doi.org/10.1117/12.904884

2011-01-01

Abstract:This paper presents a linear-rotary micro-stage that can generate motions along and about the Z-axis using piezoelectric elements (PZTs). The small stroke of a PZT is extended by repeating the PZT motions based on a mechanism of impact friction drive. The friction drive mechanism has a simple driving unit, which only consists of a PZT element and a friction element. The moving element of the stage, which is a steel cylinder, is supported and actuated by a driving unit, which consists of two PZTs and a friction component made by permanent magnet. The magnetic force is employed for holding the moving element and stabilizing the driving condition. The dimension of the stage is 7.0 mm x 8.8 mm x 7.5 mm. The moving ranges of the stage are about 5.0 mm in the Z-direction and 360 degrees in the theta(z)-direction, respectively. The maximum moving speeds are approximately 30 mm/s and 84 rpm in the two directions, respectively.

Development of a large-stroke piezo-actuated stage for nanopositioning

A piezodriven three dimensional micropositioning stage for nano-manufacturing

A Novel Piezoelectrically Actuated 2-Dof Compliant Micro/Nano-Positioning Stage with Multi-Level Amplification

Design And Analysis Of Two Dimensional X-Y Micropositioning Stage

A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle

Development of a compact and long range XYθ(z) nano-positioning stage.

A Novel Hybrid Actuation Mechanism Based XY Nanopositioning Stage with Totally Decoupled Kinematics

Design, modeling, analysis and testing of a novel piezo-actuated XY compliant mechanism for large workspace nano-positioning

Redundantly Piezo-Actuated XYθ Z Compliant Mechanism for Nano-Positioning Featuring Simple Kinematics, Bi-Directional Motion and Enlarged Workspace

Modeling and Control of a Novel X-Y Parallel Piezoelectric-Actuator Driven Nanopositioner

Design of a Novel Low-Cost and Long-Stroke Co-Planar Stage for NanopositioningNeuartiger preisgünstiger Zwei-Ebenen-Positioniertisch für die Nanopositionierung

A piezo-actuated nanopositioning stage based on spatial parasitic motion principle

Design and Experimental Study of a Stepping Piezoelectric Actuator with Large Stroke and High Speed

A Multi-Mode Self-Centering Piezo Actuator: Design, Analysis and Its Application in Full-Stroke Microscopic Imaging

A 3-DOF piezoelectric driven nanopositioner: Design, control and experiment

A Novel Inertial Micro-Actuator and Its Application in Positioning Mechanism

Design and Analysis of an X–Y Parallel Nanopositioner Supporting Large-Stroke Servomechanism

A Gravity-Assisted Piezoelectric Inertial Actuator for Bidirectional Smooth Drives by Single Excitation Source

Design, modeling, and analysis of a new XYθ piezoelectric microstage featuring high amplification ratios and multiple actuation modes

Design of A Long Stroke Nanopositioning Stage with Self-damping Actuator and Flexure Guide

Design of a linear-rotary micro-stage