Modeling of the Variable Reluctance Actuator in Ultra-precision Microstage

CHEN Anlin,ZHANG Ming,ZHU Yu
DOI: https://doi.org/10.13334/j.0258-8013.pcsee.2015.20.026
2015-01-01
Abstract:This paper presented the models of the magnetic field and thrust of the variable reluctance actuator (VRA) in ultra-precision microstage for real-time control of the VRA. Magnetic circuit models of the magnetic field produced by the permanent magnet and the magnetic field produced by the coils were respectively built. Leakage magnetic fields were taken into consideration when the magnetic circuit models were built. Simultaneously, when the movers were at different positions, three-dimensional leakage coefficients obtained from finite element method (FEM) simulations showed the values and distributions of the leakage magnetic fields in every gap. Firstly, the model of the magnetic field of the VRA was derived when the mover was at several positions of the positive part of the x axis. Then, utilizing fitting, the model of the magnetic field at every position of the positive part of the x axis was derived. Utilizing symmetry, the models of the magnetic field on the whole stroke was derived. Finally, according to the model of the magnetic field and Maxwell formula, the model of the thrust of the VRA on the whole stroke was derived. The error between the model and the FEM simulations result is less than 6.4%, and the models are proved by an experiment.
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