JEDEC-Qualified Highly Reliable 22nm FD-SOI Embedded MRAM For Low-Power Industrial-Grade, and Extended Performance Towards Automotive-Grade-1 Applications
Y. Huang,T. Merbeth,J.H. Lim,B. Pfefferling,S. K. L. C. Goh,B. Behin-Aein,G. Congedo,V. Kriegerstein,J. Kwon,J. W. Ting,S. Ong,E. Toh,L. Zhang,F. Tan,R. Low,C. Seet,V. B. Naik,A. Vogel,K. W. Gan,D. Zeng,J. Hwang,T. Ling,Y. Otani,T. Chan,Y. You,J. Mueller,L. Pu,J. Xu,N. Chung,S. Siah,E. Quek,H. Yoon,S. Woo,J. Wong,R. Chao,L. Y. Hau,C. Chiang,N. Balasankaran,O. Kallensee,T.Y. Lee,K. Yamane,S. Jang,H. Dixit,C.G. Lee,W. Neo
DOI: https://doi.org/10.1109/IEDM13553.2020.9371935
2020-12-12
Abstract:We demonstrate highly reliable and mass-production ready 22nm FD-SOI 40Mb embedded-MRAM for industrial-grade (-40~125°C) applications. This technology having 5x solder reflows compatibility stack has passed JEDEC standard qualification (ECC-OFF) with total reliability failures below the product life-time bit-failure-rate requirement for industrial-grade. Using design-process co-optimization, we show the extended performance to meet -40~150°C product operation for Auto-Grade-1 applications with stable read performance, ~47% reduced read power, data retention of 20yrs (0.1 PPM), read disturb rate of <1 PPM for ~1M cycles with 500Oe field, 1M endurance cycles, and stand-by magnetic immunity (SMI) of ~1400Oe at 25°C and ~500Oe at 150°C (0.1 PPM). With magnetic shield-in package solution, we demonstrate ~4kOe SMI at 25°C for 48hrs of field exposure.
Engineering,Materials Science