Modification of Surface Mechanical Properties of Aluminum by Nb Ion Implantation

Wei MIAO,Kun TAO,Bin Li,Baixin LIU
DOI: https://doi.org/10.3969/j.issn.1672-7126.2001.01.009
2001-01-01
Abstract:The surface modification of Al films by high current Nb ion implantation with a metal vapor vacuum arc ion source was studied.The intermetallic compounds,Al3Nb,directly formed with Nb ion implantation into Al films with a current intensity of 9 mA to a dose of 3×1017 ions/cm2.The hardened aluminides layer,about 200 nm in thickness was obtained and with increasing the Nb ion dose the hardness of the Al surface could increase up to three times larger than that of the unimplanted one.Besides,the modulus of the Al surface were significantly increased by the aluminides.
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