High Current Ni- and Fe-ion Implantation into an Al Surface to Modify the Mechanical Properties

BX Liu,KY Gao

DOI: https://doi.org/10.1016/s0254-0584(98)00070-4

IF: 4.778

1998-01-01

Materials Chemistry and Physics

Abstract:The surface modification of Al was studied by high current Ni- and Fe-ion implantation using a metal vapor vacuum arc ion source. The strengthening intermetallic aluminides were formed after Ni- and Fe-ion implantation to doses in the order of 1017–1018 ions cm−2. The depth profiles of the hardening phases were found to depend on the ion current density as well as the dose. In the case of Ni-implantation, when implanting with a current density of 89 μA cm−2 to a dose of 6 ×1017 ions cm−2, the Al3Ni phase in the near surface was enriched up to 85 vol.% and extended into a depth of about 4000 Å. In the case of Fe-ion implantation, a dual implantation resulted in an almost unique Al13Fe4 compound standing in the near surface layer of 1000 Å in thickness and spreading to 4500 Å in depth. Accordingly, the microhardness of the implanted Al films was measured and found to be considerably increased. The mechanisms responsible for the formation of intermetallic aluminides and surface hardening are also discussed.