Improved Mechanical Properties of Al2O3/PTFE Layer by Metal Ion Implantation

Xuan Shao,Yong De Zhang,Hui Tan
DOI: https://doi.org/10.14257/ijca.2015.8.12.08
2015-01-01
International Journal of Control and Automation
Abstract:In this work, metal ion implantation was employed to improve the mechanical properties of Al 2 O 3 /polytetrafluoroethylene (Al 2 O 3 /PTFE).Four metal ions (Al, Cr, Ni, and Ag) were selected as the implantation source, respectively, and the implantation process was optimized by SRIM method.Optimization results revealed that, among these four metal ions, implantation of Al ions exhibited the best modification for Al 2 O 3 /PTFE composite layer, when the particle distribution section, distribution range and energy exchange were concerned.Al ion implantation could minimize the damage of carbon skeleton and lamellar structure of Al 2 O 3 /PTFE substrate, which kept strong scattering of Al ions and obtained the thick and uniform coating on the surface of Al 2 O 3 /PTFE substrate.The uniformity of Al 2 O 3 /PTFE layer was improved with the increase in Al ions implantation dosage and the best dosage of Al ions was regarded as 1×10 16 ions/cm 3 with the implantation energy of 20KeV.After implantation modification, the mechanical properties of Al 2 O 3 /PTFE layer were obviously improved.The hardness (H)of samples was detected to be 0.65GPa and elastic modulus (E) 2.2 GPa, with a higher H/E value of 0.295, which was 10 times higher than original PTFE.
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