Study of Microfabrication and Error Calibration for Multilevel Diffractive Optical Element by Thin Film Deposition

Yong-Qi FU,Jing-Li ZHAO,Ji-Xue LI,Xin ZHANG,Xuan-Ming ZHENG
DOI: https://doi.org/10.3321/j.issn:1004-924X.1999.05.011
1999-01-01
Optics and Precision Engineering
Abstract:Photolithographic patterning and thin fi lm deposition were used for manufacturing multilevel diffractiveoptical element (DOE). Fabrication errors and its affecting factors were analyzed for multilevel DOE in this paper. Calibrationmethod was come up with to modify alignment error. It was proved by actual manufacturing process that this method isavailable for aligning positioning error.
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