Analysis of fabrication errors and study of calibration method for multilevel diffractive optical element

Yongqi Fu
1998-01-01
Abstract:The manufacture error of multilevel step diffraction optical element (DOE) consists of positioning error and alignment error, where the alignment error is larger and it affects diffraction efficiency of DOE greatly. Positioning error is the main factor influencing diffraction efficiency in alignment error. A method of Moire fringe alignment was put forth. It has been proved by actual manufacturing that this method is available for aligning positioning error.
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