Simulation of Sub-Threshold Characteristics in Strained SiGe Channel PMOSFET

TU Jing,YANG Rong,LUO Jin-sheng,ZHANG Rui-zhi
DOI: https://doi.org/10.3969/j.issn.1005-9490.2005.03.015
2005-01-01
Abstract:Sub-threshold characteristics of strained SiGe PMOSFETs and Si PMOSFETs are theoretically analyzed with simplified models, then are simulated and compared by using a two-dimensional simulator, Medici. The cutoff current and the sub-threshold slope varying with vertical structure parameters are also studied. The simulation results are well consistent with the theoretical analysis, and show that the sub-threshold characteristics of strained SiGe PMOSFETs, which are worse than those of Si PMOSFETs, are sensitive to vertical structure parameters and worth carefully paying attention to.
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