Simulation of Deep Submicron Strained SiGe Channel PMOSFET Performance

杨荣,罗晋生
DOI: https://doi.org/10.3969/j.issn.1000-3819.2003.02.007
2003-01-01
Abstract:In order to investigate the validity that the SiGe layer incorporated into deep submicron PMOSFET improves device performances, a strained Si 1-xGe x buried channel PMOS FET of 0.18 μm is simulated employing the MEDICI simulator, and compared with a conventional Si PMOSFET. The SiGe PMOS, whose vertical structure is Si/SiGe/Si layers and horizontal structure is the same as conventional PMOSFET, can obtain proper threshold voltage and good hole confinement by using an N +-poly-Si gate and a underlying P-type δ-doping layer. Many former studies considered that the strained layer can only improve the performance of PMOSFETs very finitely, while this simulation result of the aformentioned device structure denotes that the values of the parameters I Dmax, g m and f T of the SiGe PMOS are enhanced at least 100% compared with the Si PMOS, which shows the great application potential of deep submicron SiGe PMOS.
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