Abstract:High-precision microelectromechanical system (MEMS) accelerometers have wide application in the military and civil fields. The closed-loop microaccelerometer interface circuit with switched capacitor topology has a high signal-to-noise ratio, wide bandwidth, good linearity, and easy implementation in complementary metal oxide semiconductor (CMOS) process. Aiming at the urgent need for high-precision MEMS accelerometers in geophones, we carried out relevant research on high-performance closed-loop application specific integrated circuit (ASIC) chips. According to the characteristics of the performance parameters and output signal of MEMS accelerometers used in geophones, a high-precision closed-loop interface ASIC chip based on electrostatic time-multiplexing feedback technology and proportion integration differentiation (PID) feedback control technology was designed and implemented. The interface circuit consisted of a low-noise charge-sensitive amplifier (CSA), a sampling and holding circuit, and a PID feedback circuit. We analyzed and optimized the noise characteristics of the interface circuit and used a capacitance compensation array method to eliminate misalignment of the sensitive element. The correlated double sampling (CDS) technology was used to eliminate low-frequency noise and offset of the interface circuit. The layout design and engineering batch chip were fabricated by a standard 0.35 μm CMOS process. The active area of the chip was 3.2 mm × 3 mm. We tested the performance of the accelerometer system with the following conditions: power dissipation of 7.7 mW with a 5 V power supply and noise density less than 0.5 μg/Hz1/2. The accelerometers had a sensitivity of 1.2 V/g and an input range of ±1.2 g. The nonlinearity was 0.15%, and the bias instability was about 50 μg.

A Way of Automatic Measuring Micro-Accelerometer Using Monolithic Computer

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

Automatic measuring system of MEMS accelerometer

Digital Capacitance Measurement System Based on FPGA

One Method to Improve the Temperature Stability of Processing Circuit of Digital Accelerometer

Microchip Controlled Electronic Circuit for Measurement of the Angular Acceleration

A High-Performance Multi-Beam Microaccelerometer for Vibration Monitoring in Intelligent Manufacturing Equipment

Performance Testing of Micro-Electromechanical Acceleration Sensors for Pavement Vibration Monitoring

Design of Electronic Scales System based on the Single-Chip Microcomputer

A Hybrid Micro-Accelerometer System with CMOS Readout Circuit and Self-Test Function

Research and Design of a Micro Air Data Computer

Research on High-Resolution Miniaturized MEMS Accelerometer Interface ASIC

An A/D Converting Technology with High Precision,Low Cost and Multiple Measuring Range

Application Design and Integration of MEMS ADXL202 of Wireless Acceleration Sensor

Design of MEMS High-G Micro Accelerometer Temperature Compensation

Attitude Measurement System Based On Multi-sensor

Study on an intelligent method for real time measurement

A System Design Method of Micro-G Silicon Accelerometer with A Cmos Precision Interface Circuit

Design of Data Acquisition System for Micro-accelerometer Based on ARM and FPGA

Microfabricated Neuroaccelerometer: Integrating Sensing and Reservoir Computing in MEMS

A Low-Power and Robust Micromachined Thermal Convective Accelerometer