Preparation of Ultra-Thin Freestanding Polyimide Films with Sequential Evaporation Technique

QI Tong-fei,WU Yong-gang,WANG Yong,ZHANG Li,LIN Xiao-yan,TIAN Guo-xun,JIAO Hong-fei,CHEN Ling-yan
2005-01-01
High Power Laser and Particle Beams
Abstract:Ultra-thin freestanding polyimide(PI) films of 100 nm thickness were formed by sequential evaporation of 4,4'-diaminodiphenyl ether(ODA) and pyromellitic dianhydride(PMDA) precursor monomers followed by a thermal treatment of 150 ℃ 1 h and 350 ℃ 2 h.The chemical structures of the PI films were investigated using FTIR spectroscopy and the degree of imidization was calculated.Results show that the PI film has a fully imidization.The surface morphology of the films,compared with co-deposited PI films,was observed using AFM,the surface morphology of the PI films would be better by depositing ODA first.
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