Ionization damage behavior of gate controlled lateral PNP(GLPNP) transistors in H2 environment

Xingji LI,Zhaoji CHEN,Jianqun YANG,Chaoming LIU,Guoliang MA
DOI: https://doi.org/10.11805/TKYDA201704.0690
2017-01-01
Abstract:Hydrogen,in its various forms (molecular hydrogen,atomic hydrogen or hydrogen anions), has an important and sometimes critical impact on the ionization damage behavior of electron device. This affects the radiation resistance of the device. In the paper,defect evolution of the irradiated Gated Lateral PNP(GLPNP) transistors by 1 MeV electrons in air and H2 environment is researched. Electric performance parameters including the base current versus gate voltage Gate Sweep(GS) and Gummel curves are measured immediately in-situ using KEITHLEY 4200-SCS semiconductor parameter measurement system. The relationship between performance degradation and electron irradiation fluence,and hydrogen concentration is studied. Defect evolution of the irradiated GLPNP transistors by 1 MeV electrons in H2 environment is researched by GS and Deep Level Transient Spectroscopy(DLTS) techniques. Results show that compared with that in air,the base current of the GLPNP soaked in H2 is significantly increased by the 1 MeV electrons, while collector current is obviously decreased. In the case, more oxide charges and interface states are produced. These phenomena indicate that molecular hydrogen aggravates ionization damage of the GLPNP bipolar transistor.
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