Terahertz signal detector improvement based on capacitive coupling structure

Lei XU,Xuecou TU,Chao WAN,Yufeng PEI,Lin KANG,Peiheng WU
DOI: https://doi.org/10.11805/TKYDA201501.0027
2015-01-01
Abstract:A detector can achieve quick response when it is much smaller than the wavelength of the source signal in THz wave band at the expense of signal coupling capability.Therefore, an antenna is applied to collect signals in order to enhance the signal coupling capability of the detector.The properties of antenna determine the frequency response band,the sensitivity and other parameters of the detector directly. A planar-integrated antenna is adopted for signal acquisition in the Nb5N6 microbolometer detector, which is fabricated by lithography,lift-off and other processes of micro-fabrication. The Nb5N6 microbolometer is placed in the center of the planar antenna. Aiming for the center frequency of 0.32 THz, a special capacitive coupling design is proposed to improve the signal coupling capability.
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