Abstract:The combs of the comb capacitive inertial sensors fabricated by a deep reactive ion etching are usually not parallel. This non-ideal feature is greater in high aspect ratio structure and significantly affects the capacitance and electrostatic force. In this paper, the effects of non-parallel combs on the reliable operation range for step and pulse signals in three capacitive configurations are investigated when alternative electronic testing signals are applied on the sensors for detecting the variation of capacitance. Analytical expressions of the critical step acceleration and the critical time duration of pulse acceleration of the capacitive sensor whose comb electrodes have little angle of the decline are obtained. Results show that for a step inertial signal, even the angle of the decline is 0.5°, the reliable operation ranges of the sensor with single-sided structure, double-sided structure and double-sided structure with feedback voltage are diminished to 0.34, 0.44 and 0.54 of the ones whose comb electrodes are parallel, respectively, for pulse inertial signal, the reliable operation ranges with single-sided structure and double-sided structure are diminished to 0.45 and 0.56, respectively, and the ones of double-sided capacitive sensor with feedback voltage are diminished to 0.95 as the angle is changed from 0.1° to 0.15°, which show that the effects of the non-parallel can not also been ignored. Results also show that the reliable dynamic operation ranges of the sensor with double-sided comb capacitive structure are least affected by the effects of non-parallel plates and its merit is more evident as the angle of the decline of the comb electrodes increases. Compared to the effects of non-parallel comb electrodes on the reliable operation range for step inertial signal, the effects for pulse inertial signal are smaller.

Effect of Non-Parallel Combs of the Capacitive Micro-Sensor on the Pulse Signal Response

Effects of non-parallel combs on reliable operation conditions of capacitive inertial sensor for step and shock signals

Analysis of the Frequency-Dependent Vibration Rectification Error in Area-Variation-Based Capacitive MEMS Accelerometers.

EFFECT OF NON-PARALLEL PLATES OF FEEDBACK-BALANCED MICRO ACCELEROMETER ON RELIABLE OPERATION RANGE

Noise Behaviors of a Closed-Loop Micro-Electromechanical System Capacitive Accelerometer

Analysis of the Effect of the Equivalent Parallel Resistor of theComb Capacitive Accelerometer

The Parasitic Capacitance's Influence on Noise in a MEMS Accelerometer Sensor

Design of Force-Balance Capacitive Accelerometer

Corner Effect of Micro-Comb Capacitive Structure

Consideration of the Fringe Effects of Capacitors in Micro Accelerometer Design

Nonlinearity Analysis Of A Capacitance Detector Diodes Circuit For Closed-Loop Micro-Silicon Accelerometer

Calculating Capacitance and Analyzing Nonlinearity of Micro-Accelerometers by Schwarz–Christoffel Mapping

Effect of amplifier frequency characteristic on the detecting circuit of MEMS capacitive accelerometer

Modeling and Analysis of MEMS Capacitive Pressure Sensors with Vertical Comb Fingers

Sensitivity Model of Micro-machined Accelerometers Based on the Deviation of Comb Finger Gaps

Linearity Analysis of Closed-Loop Capacitive Accelerometer Due to Distance Mismatch Between Plates and the Influence of Compensation Capacitor Array

A method for improving out-of-plane robustness of an area-changed capacitive displacement transducer used in a micro-accelerometer

Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer

Comparison Study of Three Readout Methods for a Capacitive MEMS Accelerometer

Research Progress on Interface Circuit of Capacitive Micro Accelerometer.

Analysis on the Detection Capacitance of Comb Micro-Machined Gyroscope