Abstract:In this research, a high-efficiency design method of the capacitive MEMS accelerometer is proposed. As the MEMS accelerometer has high precision and a compact structure, much research has been carried out, which mainly focused on the structural design and materials selection. To overcome the inconvenience and inaccuracy of the traditional design method, an orthogonal design and the particle swarm optimization (PSO) algorithm are introduced to improve the design efficiency. The whole process includes a finite element method (FEM) simulation, high-efficiency design, and verification. Through the theoretical analysis, the working mechanism of capacitive MEMS accelerometer is clear. Based on the comparison among the sweep calculation results of these parameters in the FEM software, four representative structural parameters are selected for further study, and they are le, nf, lf and wPM, respectively. le and lf are the length of the sensing electrode and fixed electrode on the right. nf is the number of electrode pairs, and wPM is the width of the mass block. Then, in order to reduce computation, an orthogonal design is adopted and finally, 81 experimental groups are produced. Sensitivity SV and mass Ma are defined as evaluation parameters, and structural parameters of experimental groups are imported into the FEM software to obtain the corresponding calculation results. These simulation data are imported into neural networks with the PSO algorithm. For a comprehensively accurate examination, three cases are used to verify our design method, and every case endows the performance parameters with different weights and expected values. The corresponding structural parameters of each case are given out after 24 iterations. Finally, the maximum calculation errors of SV and Ma are 1.2941% and 0.1335%, respectively, proving the feasibility of the high-efficiency design method.

Modeling and Analysis of MEMS Capacitive Pressure Sensors with Vertical Comb Fingers

Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique.

Analysis of mechanical errors of planar capacitive sensor for two dimensional displacement measurement

Simulation and Design of Piezoelectric Microcantilever Chemical Sensors

Modeling and Analysis of A Flexible Capacitive Tactile Sensor Array for Normal Force Measurement

A Modified Analytical Model to Study the Sensing Performance of a Flexible Capacitive Tactile Sensor Array

An Analytical Model for Studying the Structural Effects and Optimization of A Capacitive Tactile Sensor Array

Efficient in-depth analysis and optimum design parameter estimation of MEMS capacitive pressure sensor utilizing analytical approach for square diaphragm

Study of a Novel Capacitive Pressure Sensor Using Spiral Comb Electrodes

A Simulation Based Geometrical Analysis of MEMS Capacitive Pressure Sensors for High Absolute Pressure Measurement

Optimal design parameter estimation and analytical investigation of MEMS quadruple touch mode capacitive pressure sensor

Modeling the Flexible Capacitive Pressure Sensor with a Polymer Composite Dielectric Layer

AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications

Wafer-Level Self-Packaging Design and Fabrication of MEMS Capacitive Pressure Sensors

The High-Efficiency Design Method for Capacitive MEMS Accelerometer

Smart structure with elastomeric contact surface for prosthetic fingertip sensitivity development

Design and Application of a Metal Wet-Etching Post-Process for the Improvement of CMOS-MEMS Capacitive Sensors

Dynamic modelling and analysis of MEMS-based low-pressure range capacitive sensors for biomedical applications

Design and Implementation of Vertically Integrated Deformable Hermetic Chambers for the Sensitivity Enhancement of CMOS-MEMS Capacitive Pressure Sensor

Design, Modelling, and Simulation analysis of a Single Axis MEMS-based Capacitive Accelerometer

An Improved Theory for Designing and Numerically Calibrating Circular Touch Mode Capacitive Pressure Sensors