Safe Operation Conditions of Capacitive Inertial Sensor for Dynamic Signals.
Minhang Bao,Yuancheng Sun,Yiping Huang,Yuelin Wang
DOI: https://doi.org/10.1142/s1465876303000892
2003-01-01
International Journal of Computational Engineering Science
Abstract:International Journal of Computational Engineering ScienceVol. 04, No. 02, pp. 195-200 (2003) Invited PaperNo AccessSAFE OPERATION CONDITIONS OF CAPACITIVE INERTIAL SENSOR FOR DYNAMIC SIGNALSMINHANG BAO, YUANCHENG SUN, YIPING HUANG, and YUELIN WANGMINHANG BAODepartment of Micro Electronics, Fudan University, Shanghai 200433, ChinaPh: +86-21-65642763, Fax: +86-21-65643449. Search for more papers by this author , YUANCHENG SUNDepartment of Micro Electronics, Fudan University, Shanghai 200433, China Search for more papers by this author , YIPING HUANGDepartment of Micro Electronics, Fudan University, Shanghai 200433, China Search for more papers by this author , and YUELIN WANGShanghai Institute of Micro System and Information Technologies, Shanghai 200050, China Search for more papers by this author https://doi.org/10.1142/S1465876303000892Cited by:0 (Source: Crossref) PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractFor capacitive sensors, alternative electric testing signals are needed for detecting the variation of capacitance. Due to the electrostatic force of the testing signal, the seismic mass of the sensor may be pulled into contact with the static electrode. In this paper, safe operation ranges for capacitive accelerometers with light damping for dynamic inertial signals (step and pulse signals) are investigated for single- and double-sided configurations. The results show that the safe signal level of step inertial signal is smaller than that of quasi-static signal by a factor of 0.5 to 0.7. For pulse inertial signal, the safe operation condition is dependent on the product of the amplitude and the time duration of the pulse.Keywords:Capacitive sensorSafe operation conditionDynamic signal References H. Leuthold and F. Rudolf, Sensors and Actuators A21–23, 278 (1990). Google ScholarW. Kuehnel and S. Sherman, Sensors and Actuators A45, 7 (1994). Google ScholarR. Peurs and D. Lapadatu, Sensors and Actuators A56, 203 (1996). Google ScholarMinhang Baoet al., Sensors and Actuators A84, 213 (2000). Google Scholar M. Bao , Handbook of Sensors and Actuators 8 , ed. S. Middelhoek ( Elsevier , 2000 ) . Google Scholar FiguresReferencesRelatedDetails Recommended Vol. 04, No. 02 Metrics History KeywordsCapacitive sensorSafe operation conditionDynamic signalPDF download