Effects of non-parallel combs on reliable operation conditions of capacitive inertial sensor for step and shock signals

Linxi Dong,Lufeng Che,Lingling Sun,Yuelin Wang

DOI: https://doi.org/10.1016/j.sna.2005.03.048

2005-01-01

Abstract:The combs of the comb capacitive inertial sensors fabricated by a deep reactive ion etching are usually not parallel. This non-ideal feature is greater in high aspect ratio structure and significantly affects the capacitance and electrostatic force. In this paper, the effects of non-parallel combs on the reliable operation range for step and pulse signals in three capacitive configurations are investigated when alternative electronic testing signals are applied on the sensors for detecting the variation of capacitance. Analytical expressions of the critical step acceleration and the critical time duration of pulse acceleration of the capacitive sensor whose comb electrodes have little angle of the decline are obtained. Results show that for a step inertial signal, even the angle of the decline is 0.5°, the reliable operation ranges of the sensor with single-sided structure, double-sided structure and double-sided structure with feedback voltage are diminished to 0.34, 0.44 and 0.54 of the ones whose comb electrodes are parallel, respectively, for pulse inertial signal, the reliable operation ranges with single-sided structure and double-sided structure are diminished to 0.45 and 0.56, respectively, and the ones of double-sided capacitive sensor with feedback voltage are diminished to 0.95 as the angle is changed from 0.1° to 0.15°, which show that the effects of the non-parallel can not also been ignored. Results also show that the reliable dynamic operation ranges of the sensor with double-sided comb capacitive structure are least affected by the effects of non-parallel plates and its merit is more evident as the angle of the decline of the comb electrodes increases. Compared to the effects of non-parallel comb electrodes on the reliable operation range for step inertial signal, the effects for pulse inertial signal are smaller.