Effect of Sintering Temperature on Densification of GZO Ceramic Target Prepared by Pressureless Sintered

Linlong YE,Yihua SUN,Yuandong QIN,Liang FANG,Wangxi WEN

DOI: https://doi.org/10.16521/j.cnki.issn.1001-9642.2018.02.010

2018-01-01

Abstract:GZO-3Ga ceramic targets (ZnO ∶ Ga2O3=97 ∶ 3 wt％) were prepared by pressureless sintering.The influences of sintering temperature on the density,crystal structure,microstructure and sintering behavior were investigated.The result suggested that the sintering temperature has a promoting effect on the diffusion of Ga.The spinel phase of ZnGa2O4 was generated by solid phase reaction when the sintering temperature reached 1000 ℃ and would react with ZnO to generate Zn9Ga2O12 with temperature rising.The highest relative density of 90.5％ TD (Theoretical Density) were achieved at 1400 ℃ by direct heating and the relative density of the specimen sintered by sintering processes based on thermal shrinkage curve was raised to 93.54％ TD.