Precision measurement method of compression coefficient for density standard liquid close to single crystal silicon
Wang Jintao,Liu Ziyong,Tong Lin,Luo Zhiyong,Li Zhanhong
DOI: https://doi.org/10.19650/j.cnki.cjsi.2014.02.033
2014-01-01
Abstract:The density standard liquid at 2329 kg/m3 close to single crystal silicon (DSL-2329) is widely used in the precise machining of silicon single crystal material, and the accurate measurement of the volume compression coefficient of this liquid plays an important role in the quality control of silicon single crystal machining. To improve the measurement accuracy of the existing measurement method, a measurement method based on hydrostatic suspension principle is discussed to determine the compression coefficient of DSL-2329 liquid. The single crystal sphere is immersed into a sealed vessel full of DSL-2329.The density of the liquid can be adjusted through changing the liquid temperature and static pressure, and the hydrostatic suspension of the silicon single crystal sphere is achieved. The silicon single crystal sphere could be suspended at different temperatures and static pressures, where the temperature and static pressure parameter comply with a linear mathematical model. The compression coefficient is calculated using the data of temperature and static pressure at the suspension state. A hydrostatic suspension experimental system was designed with maximal temperature control error ��1.0��10-4��C within 3 h, and the static floating of the silicon single crystal sphere could be achieved through static pressure regulation with a PID control system. In the experiment, the mixture of 1,2,3-tribromopropane and 1,2-dibromoethane was used as the DSL-2329 liquid. The compression coefficient was measured, and its value is 5.15��10-10 Pa-1, which verifies the effectiveness of the proposed measurement method and experimental system.