Influence Mechanism of Plasma Cleaning and Ion Beam Figuring on the Intrinsic Surface of Fused Silica

Kun Zhang,Feng Shi,Lin Zhou,Wanli Zhang,Yifan Dai
DOI: https://doi.org/10.1117/12.2524520
2019-01-01
Abstract:The laser damage threshold of fused silica optics is affected by the surface/subsurface defects in optical fabrication and is related to surface contamination. In this paper, the evolution of surface roughness and photothermal weak absorption of fused silica treated by plasma cleaning and ion beam figuring (IBF) is studied. The results show that plasma cleaning has a certain change on the surface roughness of fused silica, while the change of photothermal weak absorption depends on the initial surface quality. The surface roughness of fused silica has a certain regularity after ion beam figuring, and the photothermal weak absorption is basically consistent with the initial.
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