High-performance 90°hybrids Based on MMI Couplers in Si3N4 Technology

Jia Yu,Jinfeng Mu,Kaixuan Chen,Michiel de Goede,Meindert Dijkstra,Sailing He,Sonia M. Garcia-Blanco
DOI: https://doi.org/10.1016/j.optcom.2020.125620
IF: 2.4
2020-01-01
Optics Communications
Abstract:Low-loss, broadband, and low phase deviation optical 90 degrees hybrids based on 2 x 4 multimode interference couplers are firstly demonstrated using Si3N4 on SiO2 technology. Only a simple traditional design method of MMI based on self-imaging theory and a single-stripe Si3N4 waveguide geometry with only one step etching process are utilized. The characterization of the fabricated devices is carried out over a wide spectral window of 1520-1610 nm, showing that the measured phase error is less than 8 degrees, and common-mode rejection ratios (CMRRs) are better than -20 dB. The measured total loss of the fabricated device including a 90 degrees hybrid and a 3-dB coupler is <1 dB in a bandwidth over 80 nm. Our analysis also shows large fabrication tolerance with width of +/- 0.1 mu m or length of +/- 3 mu m.
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