A Dual Polarization Optical 90O-Hybrid in Silicon-on-insulator Waveguides

Yanping Li,Tingting Hong,Ziyu Wang
DOI: https://doi.org/10.1117/12.888294
2011-01-01
Abstract:An all-passive dual polarization optical 90 degrees-hybrid in silicon-on-insulator waveguides is proposed and designed. It consists of two 2x2 MMI-MZI structures, working as polarization beam splitters, and two 4 x 4 MMI couplers, working as 90 degrees-hybrids. The fabrication process includes only one step of inductively coupled plasma (ICP) etching. It is particularly suitable for silicon-based integration of DP-QPSK receiver.
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