Structure and Electrical Properties of InAs/GaInSb Superlattice Film

CHEN Dao-ming,GUO Feng-yun,ZHANG Xin-jian,BAI Gui-yuan,ZHAO Lian-cheng
DOI: https://doi.org/10.3788/fgxb20153611.1252
2015-01-01
Chinese Journal of Luminescence
Abstract:InAs/GaInSb superlattice material was grown on (001)GaAs substrates by molecular beam epitaxy ( MBE) , adjusting the growth temperature and Ⅴ/Ⅲ beam ratio. The results show that the growth temperature is in the range of 385 ℃ and 395 ℃, the Ⅴ/Ⅲ beam ratio is from 5. 7:1 to 8. 7:1. RHEED situ observations to the GaAs layer (4 × 2),GaSb layer (1 × 3) and InAs layer (1 × 2) show clarity reconstructed diffraction fringes, the quality of superlattice structure is better,and with increasing temperature, the carrier concentration and mobility of the material are increased.
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