Periodic nanowire wide sample with controllable characteristic dimension and manufacturing method thereof

Zhang Yijun,Wang Chenying,Ren Wei,Jiang Zhuangde,Liu Ming,Ye Zuoguang,Mao Qi
2019-01-01
Abstract:The invention provides a manufacturing method for a periodic nanowire wide sample with a controllable characteristic dimension. The manufacturing method is characterized in that a periodic nano laminated film with a precise thickness is prepared through an ALD technology which is the best in aspects of film thickness control and three-dimensional uniformity, cutting is performed, and thickness ofthe nano film is converted into the characteristic dimension of the nanowire wide sample through micro-nano processing technologies such as butt-joint pasting, grinding and polishing, so that the technical limit that the small-dimension nanowire wide sample cannot be processed by a conventional photoetching and etching technology is broken through, and processing precision and repeatability of thenanowire wide sample can be greatly improved, and therefore, great significance is achieved for preparing the high-precision and high-quality nanowire wide sample. The method is simple and easy in preparation process, is compatible with an existing industrial semiconductor preparation process, and can prepare the high-quality periodic nanowire wide sample with low cost and simple equipment.
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