Fabrication of metallic nanostructures by negative nanoimprint lithography
Liying Jiao,Hongjun Gao,Guoming Zhang,Guoyong Xie,Xin Zhou,Yongyi Zhang,Yingying Zhang,Bo Gao,Gang Luo,Zhongyun Wu,Tao Zhu,Jin Zhang,Zhongfan Liu,Shicheng Mu,Haifang Yang,Changzhi Gu
DOI: https://doi.org/10.1088/0957-4484/16/12/006
IF: 3.5
2005-01-01
Nanotechnology
Abstract:This paper describes a negative nanoimprint lithography (N-NIL) technique for fabricating metallic nanostructures via combining conventional nanoimprint lithography (NIL) with wet chemical etching. Various metallic nanostructures such as gold grating, gold/chromium alternate bimetallic grating and gold nanoelectrode arrays, which are negative replications of the stamp pattern, have been fabricated with N-NIL. This method has demonstrated its advantages on varying the feature size of obtained metallic nanostructures with a single stamp as well as on fabricating bimetallic nanostructures. In addition, it offers a unique path to fabricate micro-nano complex structures in a single imprint process, which compensates the limitation of conventional nanoimprint lithography and maintains the advantages of conventional nanoimprint lithography such as high throughput. low cost and sub- 100 nm resolution.