Abstract:This research reports the development of 3D carbon nanostructures that can provide unique capabilities for manufacturing carbon nanotube (CNT) electronic components, electrochemical probes, biosensors, and tissue scaffolds. The shaped CNT arrays were grown on patterned catalytic substrate by chemical vapor deposition (CVD) method. The new fabrication process for catalyst patterning based on combination of nanoimprint lithography (NIL), magnetron sputtering, and reactive etching techniques was studied. The optimal process parameters for each technique were evaluated. The catalyst was made by deposition of Fe and Co nanoparticles over an alumina support layer on a Si/SiO2 substrate. The metal particles were deposited using direct current (DC) magnetron sputtering technique, with a particle ranging from 6 nm to 12 nm and density from 70 to 1000 particles/micron. The Alumina layer was deposited by radio frequency (RF) and reactive pulsed DC sputtering, and the effect of sputtering parameters on surface roughness was studied. The pattern was developed by thermal NIL using Si master-molds with PMMA and NRX1025 polymers as thermal resists. Catalyst patterns of lines, dots, and holes ranging from 70 nm to 500 nm were produced and characterized by scanning electron microscopy (SEM) and atomic force microscopy (AFM). Vertically aligned CNTs were successfully grown on patterned catalyst and their quality was evaluated by SEM and micro-Raman. The results confirm that the new fabrication process has the ability to control the size and shape of CNT arrays with superior quality.

Fabrication of Carbon Nanotube Arrays for Field Emission and Sensor Devices by Nanoimprint Lithography

Fabrication and Characterization of Gated Carbon Nanotube Emitters in A Trench Structure

Carbon Nanotube Arrays on Flexible Substrate and Their Field Emission Characteristics

Carbon Nanotubes On Carbon Fabrics For Flexible Field Emitter Arrays

Efficient Carbon Nanotube Field Emitter Using Electrospun Carbon Nanofibers as a Flexible Electrode

Lateral Field Emitters Fabricated Using Carbon Nanotubes

Electron emission from arrays of carbon nanotubes/fibres

Using Nanoscale Thermocapillary Flows to Create Arrays of Purely Semiconducting Single-Walled Carbon Nanotubes

Nanoimprint Lithography for Next-Generation Carbon Nanotube-Based Devices

Carbon Nanotubes As Field Emission Sources

Carbon Nanotube Displays

Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system

Synthesis and Characterization of Carbon Nanotube Grown on Flexible and Conducting Carbon Fiber Sheet for Field Emitter

All carbon nanotube based flexible field emission devices prepared through a film transfer method

Fabrication of Carbon Nanotubes on Interdigitated Metal Electrode for Switchable Nanophotonic Devices

Efficient Fabrication of Carbon Nanotube Micro Tip Arrays by Tailoring Cross-Stacked Carbon Nanotube Sheets.

Wafer-Scale Fabrication of Wearable All-Carbon Nanotube Photodetector Arrays

Enhanced Field Emission From Imprinted Carbon Nanotube Arrays

High Current Field Emission from Individual Non-Linear Resistor Ballasted Carbon Nanotube Cluster Array

Mechanical Fabrication of Carbon Nanotube Films and Their Field-Emission Properties

Effect of Ion Beam Etching on the Field Emission of Carbon Nanotube Arrays