Optical fiber cantilever vibrating sensor and manufacturing method thereof

Tian Bian,Li Kaikai,Zhan Feng,Zhao Na,Lin Qijing,Jiang Zhuangde

2018-01-01

Abstract:The invention discloses an optical fiber cantilever vibrating sensor and a manufacturing method thereof. The optical fiber cantilever vibrating sensor comprises a silicon pedestal, an optical fiber cantilever, an encapsulation shell and a single-fiber collimator, wherein the encapsulation shell is fixed to the silicon pedestal, a first groove is formed in the bottom of the encapsulation shell, anda second groove and a third groove are formed in the upper surface of the silicon pedestal. The second groove is communicated with the third groove, the first groove is located over the second groove, the end of the single-fiber collimator is inserted into the first groove, the end of the optical fiber cantilever stretches into the second groove along the third groove, and light rays emitted fromthe end of the optical fiber cantilever is reflected by the inner wall of the second groove and enter the single-fiber collimator. By means of the sensor, measurement of vibration can be achieved, the size is small, the anti-electromagnetic interference capacity is high, and the manufacturing method is simple and easy to implement.