≪title>micromechanical Silicon-Structure-based Optical Fiber Vibration Sensor for Electric Generator</title>

Dong Zhou,Pei-De Lou,Kun Qiu,Minguang Tang,Fang He,Bo Zhou
DOI: https://doi.org/10.1117/12.252187
1996-01-01
Abstract:A kind of optical fiber sensor mainly used for the terminal winding vibration monitoring in electric generator is discussed. Within this sensor, the light from a LED passes through an optical fiber; the fiber end is mounted on a reflecting cantilever beam, which is sensitive to the vibration of the detected object; the reflected light coupled back through the same fiber is modulated by the vibration and detected by a photodetector. With signal processing, the vibration acceleration, velocity and displacement can be obtained. The cantilever beam, which is the key component of the sensor, is a micromechanical silicon structure. The bandwidth of the sensor is 10 - 1000 Hz, resolution 0.1 m/s2, dynamic range 0 - 10 multiplied by 9.8 m/s2, weight 15 grams, fiber length 1000 m. The result of the experiment in a real electric generator is proposed.
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