A Novel Optical Fiber Reflective Read out Microcantilever Biosensor

Feng Wen,Yuejin Zhao,Xiaomei Yu

DOI: https://doi.org/10.1117/12.904826

2011-01-01

Abstract:Microcantilever as state-of-art sensor platforms has been widely investigated. Optical Fiber biosensors have the potential to provide cost-effective, real time, continuous, in situ measurements. The micro cantilever was fabricated on single crystalline SOI wafer using a series of side definitions and backside wet/dry etchings. Since the micro cantilevers are to be used as biosensor, 50 nm Au layer was deposited for the immobilized of bimolecular on the cantilever surface and for reflecting the beam of light back into the fiber, the different light intensities means different bimolecular concentrations. The lamp-house is 1310 nm super luminescent LED. Single mode fiber with gradient index lens as a collimator and 3dB 50: 50 optical coupler was used to transmit light. PINFET was used to convert the reflecting the light intensities into electronic signal. The test results demonstrated that the optical fiber reflective read out microcantilever biosensor has high sensitivity, high dynamic response, a greatly reduced size and high precision.